JPS6321557U - - Google Patents
Info
- Publication number
- JPS6321557U JPS6321557U JP1986115193U JP11519386U JPS6321557U JP S6321557 U JPS6321557 U JP S6321557U JP 1986115193 U JP1986115193 U JP 1986115193U JP 11519386 U JP11519386 U JP 11519386U JP S6321557 U JPS6321557 U JP S6321557U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- surface plate
- line width
- grindstone
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986115193U JPS6321557U (ko) | 1986-07-29 | 1986-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986115193U JPS6321557U (ko) | 1986-07-29 | 1986-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6321557U true JPS6321557U (ko) | 1988-02-12 |
Family
ID=30998614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986115193U Pending JPS6321557U (ko) | 1986-07-29 | 1986-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6321557U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129669A (ja) * | 1990-09-19 | 1992-04-30 | Mitsubishi Materials Corp | ウェーハの超精密研磨方法及び研磨装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6119560A (ja) * | 1984-07-05 | 1986-01-28 | Matsushita Electric Ind Co Ltd | 研摩定盤装置 |
-
1986
- 1986-07-29 JP JP1986115193U patent/JPS6321557U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6119560A (ja) * | 1984-07-05 | 1986-01-28 | Matsushita Electric Ind Co Ltd | 研摩定盤装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04129669A (ja) * | 1990-09-19 | 1992-04-30 | Mitsubishi Materials Corp | ウェーハの超精密研磨方法及び研磨装置 |