JPS63213738A - Clean zone unit - Google Patents

Abstract

PURPOSE:To prevent the backflowing of air even if one of blowers stops and make it possible to maintain the cleanness at a fixed value in the clean zone by providing a damper which opens by wind pressure and closes with no pressure for each discharge port of each of blowers provided at each of ducts that communicate with the space below a floor. CONSTITUTION:The floor of a clean zone 15 is pierced with many holes 19 so that the clean zone is formed with a multi-hole floor 18, and above ducts 16 and 17 which communicate with the space 20 below the floor a first, second, and third blowers 21, 22, and 23 are provided and the discharge ports 24, 25, and 26 of those blowers are provided with dampers 30, 31, and 32. Normally by the wind pressure developed by operating the first, second, and third blowers 21, 22, end 23, the dampers 30, 31, and 32 open and the air is discharged via a chamber 33 to the clean zone 15 after being filtered of dusts by a high performance filter 34. Supposing that the second blower 22 stops due to blown fuse or other reasons the damper 31 is subject to no pressure and closes. Accordingly, there is no backflow from the chamber 33 to the duct 16 and the air discharged from other first and third blowers 21 and 23 is gotten rid of dusts and sent to the clean zone 15.

Description

DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to the prevention of backdrafts in clean zone units.

BACKGROUND OF THE INVENTION Conventionally, a clean zone unit that removes even the most minute dust from the air and performs air conditioning in semiconductor device production factories, food factories, precision machinery factories, hospitals, etc. has been constructed as shown in FIG. That is, ducts 2 and 3 are provided on both sides around the clean sea 71, and a first blower 4, a second blower 6, and a third blower 6 are provided above the ducts 2 and 3, and the air blown from each blower is flows into the chamber chamber 7, passes through a high performance filter 8, and flows into the clean zone 1. A porous floor 1o formed as a floor and having through holes is provided below the clean zone 1, and air flows to the underfloor 11 through the holes of the porous floor 1o and communicates with the ducts 2.3 on both sides, 1st blower above again 4. The air was circulated through the second air blower 5 and the third air blower 6.

Problems to be Solved by the Invention In such a conventional configuration, the first blower 4. Second blower 6
And if any of the third blowers 6, for example the second blower 6, is stopped due to some reason, the protective device attached to each blower (for example, a protector such as a fuse) is activated and stopped, or periodic inspection, etc. If the switch is intentionally turned off or stopped in order to save energy by controlling the number of blowers, the other first blower 4 and third blower e will not operate. Therefore, the air is blown directly into the chamber 7,
When the first blower 4 and the third blower 6 are operated, the high-performance filter 8 acts as a resistance, and the chamber chamber 7 and the space 9 become positive pressure, and most of the air stops as shown by dotted arrows H and G. The second blower 5 passes through the duct 2 and flows backwards from the underfloor 11 to the clean zone 1, or the air from the first blower 4 goes through a short circuit. By flowing back into the clean zone 1 and making a silat circuit, the cleanliness that has been maintained by a constant flow is reversed so that dust in the duct 2, under the floor 11, etc. is stirred up. There was a problem that the cleanliness of the clean zone 1 could not be maintained.

The present invention solves these problems and aims to provide a clean zone unit that can prevent backflow of air even if any of the blowers stops.

Means for Solving the Problem In order to solve this problem, the present invention provides a perforated bed that forms the floor of the IJ+ zone and communicates with the underfloor, and a porous bed that is located on both sides of the clean zone and communicates with the underfloor. ducts and blowers provided in each of the ducts, and a damper is provided at the discharge port of each blower to open according to wind pressure and close when there is no pressure.

Function: With this configuration, if any one of the blowers stops, the discharge port of the stopped blower becomes unpressurized, so the damper closes, preventing backflow from the stopped blower through the duct to the clean zone. Under normal conditions, wind pressure is applied to the outlet of the blower, opening the damper and cleaning the clean zone.

EXAMPLE An example of the present invention will be described below with reference to FIG. As shown in the figure, ducts 16 and 17 are provided on both sides of a clean zone 15 that serves as a working area in the building, and the floor of the clean zone 150 is made up of a perforated floor 18 formed by penetrating a large number of holes 19. . The ducts 16 and 17 communicate with the underfloor 2o, and above the ducts 18 and 17 are provided a first blower 21, a second blower 22, and a third blower 23. The discharge ports 24, 25.26 of each of these blowers 21, 22.23 are provided with fulcrum shafts 27, 28.

A damper 30, 31, 32 is provided which can rotate completely freely using the pivot point 29.
．． 31.32 is designed to open easily by the wind pressure blown out from the discharge ports 24, 25, 26 when the blower 21゜22.23 is operated, and when the operation is stopped, there will be no pressure, so it will automatically close. is forming. The blowers 21, 22.
A chamber chamber 33 is provided in which the air blown out by the air filter 23 obtains static pressure, and a plurality of high performance filters 34 are provided in parallel in this chamber chamber 33.

In the above configuration, normally the first blower 21 and the second blower 2
The dampers 30, 31, and 32 are opened by the wind pressure caused by the operation of the second and third blowers 23, and the dust is removed by the high-performance filter 34 through the chamber 33 and blown out to the clean zone 15. Flow from the clean zone 15 to the underfloor 20 through the holes 19 of the porous floor 18)16.
17 and becomes a reflux that is sucked into each blower 21, 22, and 23. If the second blower 22 were to stop due to a protective device (not shown) such as a blown fuse or by turning off a switch (not shown), the damper 31 would be closed (dotted line) due to no pressure. . By this closing, the backflow from the chamber chamber 33 to the duct 16 is prevented, and the damper 31 prevents the backflow, and the other first blower 2
The air blown from the first and third blowers 23 flows into the chamber 33, where it is removed by a high-performance filter 34 and blown into the clean zone 15. The air flows from the clean zone 16 through the porous floor 18 to the ducts 16 and 17 from the underfloor 20 and returns to the first blower 21 and third blower 23, forming a flow path that flows in one direction without backflow. Also, when the third blower 23 stops, the damper 32
is closed (dotted line) and the duct 17 is removed from the chamber chamber 33.
The damper 32 prevents the backflow, and the air blown to the clean zone 15 passes through the porous floor 18 and flows from the underfloor 2o to the duct 16 and returns to the first blower 21 and the second blower 22 as a circulation. This creates a flow path that flows in one direction without backflow.

Effects of the Invention As is clear from the description of the embodiments described above, the present invention provides a damper at the discharge port of each blower provided above the dust on both sides, which closes when the blower stops and opens due to wind pressure during operation. Because of this, even if one of the multiple blowers stops for some reason, the backflow will not flow from the stopped blower, and the damper will prevent backflow.
This has the effect of keeping the cleanliness of the clean zone constant at all times.

[Brief explanation of the drawing]

FIG. 1 is a block diagram of a clean zone unit according to an embodiment of the present invention provided with a backflow prevention damper, and FIG. 2 is a block diagram of a conventional clean zone unit. 16...Clean zone, 16, 17...
...Duct, 18...Porous floor, 21...
・First blower, 22...Second blower, 23...
...Third blower, 24,25゜26...Discharge port, 30,31,32...Name of Tamper-0 agent Patent attorney Toshi Nakao, male, and one other child --Clean So 2 So fl;

Claims (1)

[Claims] A porous floor forming the floor of a clean zone, ducts provided on both sides of the clean zone and communicating with the underfloor, and blowers provided in each of the ducts on both sides,
A clean zone unit comprising a damper provided at the discharge port of each of the blowers, which opens according to wind pressure and closes when there is no pressure.