JPS63207560A - Surface grinding attachment - Google Patents

Abstract

PURPOSE:To check chattering marks to be produced on a grinding surface to the minimum, by changing impressed voltage to a motor over to a corresponding small voltage when a grinding wheel is moved up to the specified position and shifted to spark-out grinding. CONSTITUTION:A grinding wheel 11 is attached to a holder 10 and a workpiece 17 to a chuck 16, respectively, while compressed air is fed to bearings 7 and 13, floating a wheel spindle 8 and a table shaft 14, and motors 9 and 15 are driven by a command of a control circuit 18, the wheel spindle 8 and the table shaft 14 are rotated, while the wheel 11 is moved to the side of the work 17 by operation of a motor 6, and infeed grinding is carried out. And, when a table 4 is moved up to the specified position, infeed is over and the motor 6 comes to a stop, impressed voltage for these motors 9 and 15 is transferred to a small voltage for spark-out grinding and, after this sparkout grinding is performed as long as the specified time, these motors 9 and 15 are stopped, and the wheel 11 is separated from the workpiece together with the table 4 by the motor 6. Thus, electromagnetic vibration in the motor is minimized, that is, chattering marks on a grinding surface are minimized.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a surface grinding device, and particularly to a surface grinding device that rotates and grinds a workpiece, such as grinding a silicon wafer. .

[Prior art]

For example, from hard and brittle materials like silicon wafers.

As a surface grinding device for grinding a workpiece with high precision, there is a known surface grinding device of a warb rotation type as disclosed in Japanese Patent Application Laid-open No. 59-187445.

In such a surface grinding device, the contact area between the workpiece and the grindstone during grinding is always constant.

Therefore, highly accurate surface grinding can be performed. J′″
[Problems to be solved by the invention] However, vibrations generated in the transmission mechanism disposed between the grinding wheel shaft and the motor, and between the tape le shaft and the motor, and electromagnetic vibrations generated in each motor, etc. As a result, chattering and shimmer remain on the surface of mirror-ground workpieces, causing problems that reduce the quality of the workpiece.

Ta.

In view of the above problems, an object of the present invention is to solve the problems described above.

Minimizes chatter marks on the grinding surface and ensures high quality.

An object of the present invention is to provide a surface grinding device that performs grinding.

[Means for solving problems]

Means of the present invention for achieving the above object will be explained based on FIG. 1 corresponding to an embodiment. .

In the figure, 8 is the grinding wheel shaft. A motor 9 includes a rotor 9a attached to the grindstone shaft 8, and a stator 9b arranged concentrically with the rotor 9&. Reference numeral 11' denotes a grindstone, which is fixed to one end of the grindstone shaft 8. .

14 is the table axis. Reference numeral 15 denotes a motor, including a rotor 15a mounted on the table shaft 14 and this rotor 1+.

The stator 15b is arranged concentrically with the stator 5a. A workpiece 17 is fixed to one end of the table shaft 14 so as to face the grindstone 11.・18 is a control circuit, which applies voltage to the motors 9 and 15 corresponding to the grinding resistance generated during cutting depth grinding, and especially corresponding to the grinding resistance generated during ribbon parkout grinding.

Switch and apply the voltage.

[For production]

The motors 9 and 15 are adapted for cutting and grinding.

Apply a voltage to connect the grinding wheel shaft 8 and the table shaft 14.

The grindstone 11 is rotated and fed into the workpiece 17 to perform cutting and grinding.

Then, until the grindstone 11 moves to a predetermined position and stops,
When the motor goes into spark-out grinding.

The voltage applied to 9.15 is switched to a smaller voltage corresponding to spark-out grinding.゛In this way, during spark-out grinding.

Grinding is carried out by minimizing the electromagnetic movement of the motors 9 and 15.

1.1 [Example] An example of the present invention is shown in Fig. 1 and Fig. 2. The explanation will be based on.

In the figure, 1 is a bed. 2 is the base, Be Lado 1
Fixed on top. 3 is the ball guide -, base 2
is fixed. 4 is at the table.

- The ball is equipped with a bearing that fits into the ball guide 3.

It is slidably supported by the guide 3. 5 is Gi.

It is fixed to bed 1 with Yabox. 6 is.

The motor is fixed to the gearbox 5. 2゜・
3. Then, the motor 6 rotates the feed screw provided in parallel to the ball guide 3 via a gear train (not shown) in the gear box 5, and rotates the table 4.

Stay in ball guide 3 and move it.

Reference numeral 7 denotes a static air bearing (hereinafter simply referred to as a bearing), which is fixed to the table 4. 8 is a grindstone shaft, which is rotatably supported by a bearing 7. Reference numeral 9 denotes a motor, which has a rotor 9a shrink-fitted to the grinding wheel shaft 8 and fixed to the bearing 7.

It consists of a fixed stator 9b. lO is a holder.

It is fixed to one end of the grindstone shaft 8. Reference numeral 11 denotes a cup O-shaped grindstone, which is attached to the holder 10.・12 is the base, which is fixed to the bed L. - 13 is a static pressure air bearing (hereinafter simply referred to as a bearing), - is fixed to the base 12. Reference numeral 14 denotes a table shaft, which is rotatably supported by the bearing 13. 151) is a motor that connects the table shaft 14
Roe is inlaid.

15a, and a stator 15b fixed to the bearing 13.

It is equipped with A chuck 16 is fixed to one end of the table shaft 14. 17 is work.

It is held by the chuck 16 by suction. 2゜・
4. 18 is the control circuit, connected to motor 6.9.15.

Then, the motor 6 is activated and the table 4 is placed in the standby position.

The motor moves the motor back and forth between the position and end of cut position.

9. In step 9.15, apply a voltage that corresponds to the grinding resistance that occurs during depth of cut grinding and a voltage that corresponds to the grinding resistance that occurs during spark-out grinding.

With the above configuration, the holder lO and chuck 16 are attached.

Attach the grindstone 11 and the workpiece 17, supply compressed air to the bearings 7 and 13, and turn the grindstone shaft 8 and table.

The shaft 14 is floated. Then, the motors 9 and 17 are operated based on the 10 commands from the control circuit 18, and the grindstone is turned.

The shaft 8 and table shaft 14 are rotated at a predetermined speed, and the motor 6 is operated to move the grindstone 11 toward the workpiece 17 to perform cutting and grinding.

Then, when the table 4 moves to a predetermined position and 15 cuts are completed and the motor 6 stops, the control cycle starts.

Based on the command from line 18, voltage is applied to motors 9 and 17.

There was a small spark-out voltage for grinding.

Switch to the correct voltage.

After a predetermined period of time has elapsed, the zero current supply to the motors 9 and 17 is stopped, the motor 6 is activated, the table 4' is moved backward, and the grindstone 11 is separated from the workpiece 17. .

By performing the grinding in this way, it is possible to use a spa.

- Each mo during pull-out grinding, that is, finish grinding.

High-quality grinding can be performed by minimizing the electromagnetic vibrations of the wheels 9 and 17.

〔Effect of the invention〕

As described above, according to the present invention, it is possible to minimize the spread marks on the grinding surface and perform high-quality grinding.

can be done.　　　　　　　　10

[Brief explanation of the drawing]

FIG. 1 shows an example of a surface grinding apparatus of the present invention. The front view, FIG. 2, is a plan view of FIG. 1.・8・
... Grinding wheel shaft, 9 ... Motor, 9a ... Rotor,
・9b...Stator, 11...Whetstone, 14
...Chi 15 pull axis, 15...motor, 15a
...Rotor. 15b... Stator, 17... Work, 1
8... system. Both circuits.

Claims (1)

[Claims] 1. Arrange the table shaft that holds the workpiece and the grindstone shaft that holds the grindstone parallel to each other so that the grinding surface of the grindstone crosses the axis of the table shaft, and rotate the grindstone while rotating each axis. In a surface grinding device that performs grinding by making a cut in A voltage equivalent to the grinding resistance generated during grinding,
A surface grinding device characterized by being provided with a control means for switching and applying a voltage corresponding to the grinding resistance generated during spark-out grinding.