JPS63202097U - - Google Patents

Info

Publication number

JPS63202097U

JPS63202097U JP9248787U JP9248787U JPS63202097U JP S63202097 U JPS63202097 U JP S63202097U JP 9248787 U JP9248787 U JP 9248787U JP 9248787 U JP9248787 U JP 9248787U JP S63202097 U JPS63202097 U JP S63202097U

Authority

JP

Japan

Prior art keywords

heater coil

heater

insulating material

covered

heat insulating

Prior art date

1987-06-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011810 insulating material Substances 0.000 claims description 4
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)