JPS63201638U - - Google Patents
Info
- Publication number
- JPS63201638U JPS63201638U JP9313787U JP9313787U JPS63201638U JP S63201638 U JPS63201638 U JP S63201638U JP 9313787 U JP9313787 U JP 9313787U JP 9313787 U JP9313787 U JP 9313787U JP S63201638 U JPS63201638 U JP S63201638U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- attached
- shaped opening
- crushing
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crushing And Grinding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9313787U JPS63201638U (en, 2012) | 1987-06-17 | 1987-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9313787U JPS63201638U (en, 2012) | 1987-06-17 | 1987-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63201638U true JPS63201638U (en, 2012) | 1988-12-26 |
Family
ID=30955457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9313787U Pending JPS63201638U (en, 2012) | 1987-06-17 | 1987-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63201638U (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010123027A1 (ja) * | 2009-04-24 | 2010-10-28 | 東京エレクトロン株式会社 | 蒸着処理装置および蒸着処理方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5415567A (en) * | 1977-07-06 | 1979-02-05 | Sumitomo Electric Ind Ltd | Powder producing apparatus |
| JPS6144237B2 (en, 2012) * | 1982-03-03 | 1986-10-01 | Kogyo Gijutsuin |
-
1987
- 1987-06-17 JP JP9313787U patent/JPS63201638U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5415567A (en) * | 1977-07-06 | 1979-02-05 | Sumitomo Electric Ind Ltd | Powder producing apparatus |
| JPS6144237B2 (en, 2012) * | 1982-03-03 | 1986-10-01 | Kogyo Gijutsuin |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010123027A1 (ja) * | 2009-04-24 | 2010-10-28 | 東京エレクトロン株式会社 | 蒸着処理装置および蒸着処理方法 |