JPS63201325U - - Google Patents
Info
- Publication number
- JPS63201325U JPS63201325U JP9389287U JP9389287U JPS63201325U JP S63201325 U JPS63201325 U JP S63201325U JP 9389287 U JP9389287 U JP 9389287U JP 9389287 U JP9389287 U JP 9389287U JP S63201325 U JPS63201325 U JP S63201325U
- Authority
- JP
- Japan
- Prior art keywords
- cap
- open end
- diffusion device
- reaction tube
- closes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Pressure Vessels And Lids Thereof (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Closures For Containers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093892U JPH071790Y2 (ja) | 1987-06-17 | 1987-06-17 | 拡散装置用自動キャップ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987093892U JPH071790Y2 (ja) | 1987-06-17 | 1987-06-17 | 拡散装置用自動キャップ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63201325U true JPS63201325U (sv) | 1988-12-26 |
| JPH071790Y2 JPH071790Y2 (ja) | 1995-01-18 |
Family
ID=30956862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987093892U Expired - Lifetime JPH071790Y2 (ja) | 1987-06-17 | 1987-06-17 | 拡散装置用自動キャップ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH071790Y2 (sv) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015153776A (ja) * | 2014-02-10 | 2015-08-24 | 光洋サーモシステム株式会社 | 熱処理装置 |
| JP2018056579A (ja) * | 2017-11-20 | 2018-04-05 | 光洋サーモシステム株式会社 | 熱処理装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS521059U (sv) * | 1975-06-23 | 1977-01-06 | ||
| JPS58111315A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | 蓋開閉装置 |
| JPS59215722A (ja) * | 1983-05-23 | 1984-12-05 | Toshiba Corp | 半導体製造装置 |
| JPS6042733U (ja) * | 1983-08-26 | 1985-03-26 | 東芝セラミツクス株式会社 | 炉芯管 |
| JPS61138238U (sv) * | 1985-02-15 | 1986-08-27 |
-
1987
- 1987-06-17 JP JP1987093892U patent/JPH071790Y2/ja not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS521059U (sv) * | 1975-06-23 | 1977-01-06 | ||
| JPS58111315A (ja) * | 1981-12-25 | 1983-07-02 | Hitachi Ltd | 蓋開閉装置 |
| JPS59215722A (ja) * | 1983-05-23 | 1984-12-05 | Toshiba Corp | 半導体製造装置 |
| JPS6042733U (ja) * | 1983-08-26 | 1985-03-26 | 東芝セラミツクス株式会社 | 炉芯管 |
| JPS61138238U (sv) * | 1985-02-15 | 1986-08-27 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015153776A (ja) * | 2014-02-10 | 2015-08-24 | 光洋サーモシステム株式会社 | 熱処理装置 |
| TWI633265B (zh) * | 2014-02-10 | 2018-08-21 | 光洋熱系統股份有限公司 | 熱處理裝置 |
| JP2018056579A (ja) * | 2017-11-20 | 2018-04-05 | 光洋サーモシステム株式会社 | 熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH071790Y2 (ja) | 1995-01-18 |