JPS63201047U - - Google Patents

Info

Publication number
JPS63201047U
JPS63201047U JP9183287U JP9183287U JPS63201047U JP S63201047 U JPS63201047 U JP S63201047U JP 9183287 U JP9183287 U JP 9183287U JP 9183287 U JP9183287 U JP 9183287U JP S63201047 U JPS63201047 U JP S63201047U
Authority
JP
Japan
Prior art keywords
grindstone
semiconductor wafer
workhead
rotation shaft
speed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9183287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9183287U priority Critical patent/JPH052278Y2/ja
Publication of JPS63201047U publication Critical patent/JPS63201047U/ja
Application granted granted Critical
Publication of JPH052278Y2 publication Critical patent/JPH052278Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
JP9183287U 1987-06-15 1987-06-15 Expired - Lifetime JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9183287U JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-15 1987-06-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9183287U JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-15 1987-06-15

Publications (2)

Publication Number Publication Date
JPS63201047U true JPS63201047U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-12-26
JPH052278Y2 JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-20

Family

ID=30952974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9183287U Expired - Lifetime JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-06-15 1987-06-15

Country Status (1)

Country Link
JP (1) JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH052278Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-20

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