JPS63200757U - - Google Patents
Info
- Publication number
- JPS63200757U JPS63200757U JP9321087U JP9321087U JPS63200757U JP S63200757 U JPS63200757 U JP S63200757U JP 9321087 U JP9321087 U JP 9321087U JP 9321087 U JP9321087 U JP 9321087U JP S63200757 U JPS63200757 U JP S63200757U
- Authority
- JP
- Japan
- Prior art keywords
- oxygen sensor
- sensor element
- electrodes
- oxide semiconductor
- semiconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9321087U JPS63200757U (US07709020-20100504-C00041.png) | 1987-06-17 | 1987-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9321087U JPS63200757U (US07709020-20100504-C00041.png) | 1987-06-17 | 1987-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200757U true JPS63200757U (US07709020-20100504-C00041.png) | 1988-12-23 |
Family
ID=30955596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9321087U Pending JPS63200757U (US07709020-20100504-C00041.png) | 1987-06-17 | 1987-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200757U (US07709020-20100504-C00041.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007017426A (ja) * | 2005-06-06 | 2007-01-25 | National Institute Of Advanced Industrial & Technology | 大気中の一酸化炭素や炭化水素の濃度を検出するガスセンサ |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5722548A (en) * | 1980-07-16 | 1982-02-05 | Matsushita Electric Ind Co Ltd | Gas sensing element |
-
1987
- 1987-06-17 JP JP9321087U patent/JPS63200757U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5722548A (en) * | 1980-07-16 | 1982-02-05 | Matsushita Electric Ind Co Ltd | Gas sensing element |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007017426A (ja) * | 2005-06-06 | 2007-01-25 | National Institute Of Advanced Industrial & Technology | 大気中の一酸化炭素や炭化水素の濃度を検出するガスセンサ |
