JPS63200343U - - Google Patents
Info
- Publication number
- JPS63200343U JPS63200343U JP9165987U JP9165987U JPS63200343U JP S63200343 U JPS63200343 U JP S63200343U JP 9165987 U JP9165987 U JP 9165987U JP 9165987 U JP9165987 U JP 9165987U JP S63200343 U JPS63200343 U JP S63200343U
- Authority
- JP
- Japan
- Prior art keywords
- facet
- wafer
- alignment
- roller
- alignment roller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002441 reversible effect Effects 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Registering Or Overturning Sheets (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9165987U JPS63200343U (enExample) | 1987-06-15 | 1987-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9165987U JPS63200343U (enExample) | 1987-06-15 | 1987-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200343U true JPS63200343U (enExample) | 1988-12-23 |
Family
ID=30952646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9165987U Pending JPS63200343U (enExample) | 1987-06-15 | 1987-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200343U (enExample) |
-
1987
- 1987-06-15 JP JP9165987U patent/JPS63200343U/ja active Pending
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