JPS6320023U - - Google Patents
Info
- Publication number
- JPS6320023U JPS6320023U JP11376786U JP11376786U JPS6320023U JP S6320023 U JPS6320023 U JP S6320023U JP 11376786 U JP11376786 U JP 11376786U JP 11376786 U JP11376786 U JP 11376786U JP S6320023 U JPS6320023 U JP S6320023U
- Authority
- JP
- Japan
- Prior art keywords
- container
- lowest position
- photoresist
- support member
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 2
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11376786U JPH035862Y2 (hu) | 1986-07-24 | 1986-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11376786U JPH035862Y2 (hu) | 1986-07-24 | 1986-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6320023U true JPS6320023U (hu) | 1988-02-09 |
| JPH035862Y2 JPH035862Y2 (hu) | 1991-02-14 |
Family
ID=30995882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11376786U Expired JPH035862Y2 (hu) | 1986-07-24 | 1986-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH035862Y2 (hu) |
-
1986
- 1986-07-24 JP JP11376786U patent/JPH035862Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH035862Y2 (hu) | 1991-02-14 |