JPS63200195U - - Google Patents
Info
- Publication number
- JPS63200195U JPS63200195U JP8732487U JP8732487U JPS63200195U JP S63200195 U JPS63200195 U JP S63200195U JP 8732487 U JP8732487 U JP 8732487U JP 8732487 U JP8732487 U JP 8732487U JP S63200195 U JPS63200195 U JP S63200195U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- actuator
- vibrating
- hole
- provided along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Microscoopes, Condenser (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8732487U JPS63200195U (fr) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8732487U JPS63200195U (fr) | 1987-06-05 | 1987-06-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63200195U true JPS63200195U (fr) | 1988-12-23 |
Family
ID=30944425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8732487U Pending JPS63200195U (fr) | 1987-06-05 | 1987-06-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63200195U (fr) |
-
1987
- 1987-06-05 JP JP8732487U patent/JPS63200195U/ja active Pending