JPS63199312U - - Google Patents
Info
- Publication number
- JPS63199312U JPS63199312U JP8732387U JP8732387U JPS63199312U JP S63199312 U JPS63199312 U JP S63199312U JP 8732387 U JP8732387 U JP 8732387U JP 8732387 U JP8732387 U JP 8732387U JP S63199312 U JPS63199312 U JP S63199312U
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- stage
- displacement sensor
- strain gauge
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 238000005452 bending Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8732387U JPS63199312U (enExample) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8732387U JPS63199312U (enExample) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63199312U true JPS63199312U (enExample) | 1988-12-22 |
Family
ID=30944423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8732387U Pending JPS63199312U (enExample) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63199312U (enExample) |
-
1987
- 1987-06-05 JP JP8732387U patent/JPS63199312U/ja active Pending