JPS63199312U - - Google Patents

Info

Publication number
JPS63199312U
JPS63199312U JP8732387U JP8732387U JPS63199312U JP S63199312 U JPS63199312 U JP S63199312U JP 8732387 U JP8732387 U JP 8732387U JP 8732387 U JP8732387 U JP 8732387U JP S63199312 U JPS63199312 U JP S63199312U
Authority
JP
Japan
Prior art keywords
actuator
stage
displacement sensor
strain gauge
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8732387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8732387U priority Critical patent/JPS63199312U/ja
Publication of JPS63199312U publication Critical patent/JPS63199312U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Control Of Position Or Direction (AREA)
JP8732387U 1987-06-05 1987-06-05 Pending JPS63199312U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8732387U JPS63199312U (enrdf_load_stackoverflow) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8732387U JPS63199312U (enrdf_load_stackoverflow) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63199312U true JPS63199312U (enrdf_load_stackoverflow) 1988-12-22

Family

ID=30944423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8732387U Pending JPS63199312U (enrdf_load_stackoverflow) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63199312U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS63199312U (enrdf_load_stackoverflow)
JPS63183526U (enrdf_load_stackoverflow)
JPS6175149U (enrdf_load_stackoverflow)
JPH01165433U (enrdf_load_stackoverflow)
JPH0189398U (enrdf_load_stackoverflow)
JPS6221066Y2 (enrdf_load_stackoverflow)
JPS6112231U (ja) 差動型アクチユエ−タ
JPS62196367U (enrdf_load_stackoverflow)
JPS6293890U (enrdf_load_stackoverflow)
JPS6175150U (enrdf_load_stackoverflow)
JPH03113996U (enrdf_load_stackoverflow)
JPH0372338U (enrdf_load_stackoverflow)
JPH0265368U (enrdf_load_stackoverflow)
JPS6359360U (enrdf_load_stackoverflow)
JPS6450697U (enrdf_load_stackoverflow)
JPH01160337U (enrdf_load_stackoverflow)
JPS64242U (enrdf_load_stackoverflow)
JPS63192724U (enrdf_load_stackoverflow)
JPS63200195U (enrdf_load_stackoverflow)
JPS64241U (enrdf_load_stackoverflow)
JPS6021155U (ja) 圧電リレ−
JPS60164218U (ja) 振動制御装置
JPS62104466U (enrdf_load_stackoverflow)
JPS63202188U (enrdf_load_stackoverflow)
JPS63145357U (enrdf_load_stackoverflow)