JPS63199161U - - Google Patents
Info
- Publication number
- JPS63199161U JPS63199161U JP9103187U JP9103187U JPS63199161U JP S63199161 U JPS63199161 U JP S63199161U JP 9103187 U JP9103187 U JP 9103187U JP 9103187 U JP9103187 U JP 9103187U JP S63199161 U JPS63199161 U JP S63199161U
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnetic ring
- axial
- radial direction
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000013077 target material Substances 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9103187U JPS63199161U (en, 2012) | 1987-06-12 | 1987-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9103187U JPS63199161U (en, 2012) | 1987-06-12 | 1987-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63199161U true JPS63199161U (en, 2012) | 1988-12-21 |
Family
ID=30951440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9103187U Pending JPS63199161U (en, 2012) | 1987-06-12 | 1987-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63199161U (en, 2012) |
-
1987
- 1987-06-12 JP JP9103187U patent/JPS63199161U/ja active Pending