JPS63199160U - - Google Patents
Info
- Publication number
- JPS63199160U JPS63199160U JP8959287U JP8959287U JPS63199160U JP S63199160 U JPS63199160 U JP S63199160U JP 8959287 U JP8959287 U JP 8959287U JP 8959287 U JP8959287 U JP 8959287U JP S63199160 U JPS63199160 U JP S63199160U
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- substrate
- temperature
- sputtering
- heat medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012530 fluid Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8959287U JPS63199160U (enExample) | 1987-06-12 | 1987-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8959287U JPS63199160U (enExample) | 1987-06-12 | 1987-06-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63199160U true JPS63199160U (enExample) | 1988-12-21 |
Family
ID=30948717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8959287U Pending JPS63199160U (enExample) | 1987-06-12 | 1987-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63199160U (enExample) |
-
1987
- 1987-06-12 JP JP8959287U patent/JPS63199160U/ja active Pending
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