JPS63199160U - - Google Patents

Info

Publication number
JPS63199160U
JPS63199160U JP8959287U JP8959287U JPS63199160U JP S63199160 U JPS63199160 U JP S63199160U JP 8959287 U JP8959287 U JP 8959287U JP 8959287 U JP8959287 U JP 8959287U JP S63199160 U JPS63199160 U JP S63199160U
Authority
JP
Japan
Prior art keywords
pipe
substrate
temperature
sputtering
heat medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8959287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8959287U priority Critical patent/JPS63199160U/ja
Publication of JPS63199160U publication Critical patent/JPS63199160U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8959287U 1987-06-12 1987-06-12 Pending JPS63199160U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8959287U JPS63199160U (US07534539-20090519-C00280.png) 1987-06-12 1987-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8959287U JPS63199160U (US07534539-20090519-C00280.png) 1987-06-12 1987-06-12

Publications (1)

Publication Number Publication Date
JPS63199160U true JPS63199160U (US07534539-20090519-C00280.png) 1988-12-21

Family

ID=30948717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8959287U Pending JPS63199160U (US07534539-20090519-C00280.png) 1987-06-12 1987-06-12

Country Status (1)

Country Link
JP (1) JPS63199160U (US07534539-20090519-C00280.png)

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