JPS63199158U - - Google Patents

Info

Publication number
JPS63199158U
JPS63199158U JP8948787U JP8948787U JPS63199158U JP S63199158 U JPS63199158 U JP S63199158U JP 8948787 U JP8948787 U JP 8948787U JP 8948787 U JP8948787 U JP 8948787U JP S63199158 U JPS63199158 U JP S63199158U
Authority
JP
Japan
Prior art keywords
shielding plate
rotating shaft
shutter device
viewport
viewing port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8948787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8948787U priority Critical patent/JPS63199158U/ja
Publication of JPS63199158U publication Critical patent/JPS63199158U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8948787U 1987-06-10 1987-06-10 Pending JPS63199158U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8948787U JPS63199158U (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8948787U JPS63199158U (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Publications (1)

Publication Number Publication Date
JPS63199158U true JPS63199158U (enrdf_load_stackoverflow) 1988-12-21

Family

ID=30948513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8948787U Pending JPS63199158U (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Country Status (1)

Country Link
JP (1) JPS63199158U (enrdf_load_stackoverflow)

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