JPS6319907A - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JPS6319907A JPS6319907A JP16495686A JP16495686A JPS6319907A JP S6319907 A JPS6319907 A JP S6319907A JP 16495686 A JP16495686 A JP 16495686A JP 16495686 A JP16495686 A JP 16495686A JP S6319907 A JPS6319907 A JP S6319907A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- face
- piezoelectric
- electrode
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 9
- 239000013078 crystal Substances 0.000 claims abstract description 4
- 238000000605 extraction Methods 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 239000011347 resin Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 238000005498 polishing Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔概要〕
セラミック基板に設けた電極に導電性樹脂を用いて接着
固定する圧電振動子において、導電性樹脂による導通を
確実に行う方法として振動板の端面を弯曲して形成する
と共に電極取り出し位置に金属膜を設けた圧電振動子。[Detailed Description of the Invention] [Summary] In a piezoelectric vibrator that is adhesively fixed to an electrode provided on a ceramic substrate using a conductive resin, the end face of the diaphragm is curved as a method to ensure continuity by the conductive resin. A piezoelectric vibrator is formed with a metal film provided at the electrode extraction position.
本発明は電極取り出し部と搭載基板との電気接続を確実
にし、信頼性を向上した圧電振動子に関する。The present invention relates to a piezoelectric vibrator with improved reliability by ensuring electrical connection between an electrode extraction part and a mounting board.
圧電振動子はニオブ酸リチウム（ＬｉＮｂＯｚ） 、タ
ンタル酸リチウム（ＬｉＴａＯｚ） ＋水晶などの圧電
結晶或いはチタン酸ジルコン酸鉛（ＰＺＴ）などの圧電
Ｅｎ ＢＢなど電気機械結合係数の大きな誘電材料から
なる薄板の両面に真空蒸着法やスパッタ法などにより金
属電極を設けたもので、この電極間に交流電界を加える
と圧電効果により、これに等しい周波数の応力を生じ、
電界の周波数が振動子の固有周波数と一敗する場合には
強い共振を起こす。A piezoelectric vibrator is a thin plate made of a dielectric material with a large electromechanical coupling coefficient, such as piezoelectric crystal such as lithium niobate (LiNbOz), lithium tantalate (LiTaOz) + quartz, or piezoelectric EnBB such as lead zirconate titanate (PZT). Metal electrodes are provided on both sides by vacuum evaporation or sputtering, and when an alternating current electric field is applied between these electrodes, stress with the same frequency is generated due to the piezoelectric effect.
If the frequency of the electric field is completely different from the natural frequency of the vibrator, strong resonance occurs.
かかる圧電振動子はマイクロコンピュータ用のクロック
信号用や電圧制御発振器の振動子として使用されている
。Such piezoelectric vibrators are used for clock signals for microcomputers and as vibrators for voltage-controlled oscillators.
第４図は圧電振動子の装着構造を示す斜視図であり、圧
電振動子は先に記したように圧電結晶或いは圧電磁器か
らなる基板１の両面に厚さが５００人程度のニクロム（
Ｎｉ −Ｃｒ）膜を下地層として厚さが１０００〜５
０００人の金（Ａｕ）膜からなる電極２がそれぞれ反対
方向に電極取り出し部３を備えてパターン形成されてい
る。FIG. 4 is a perspective view showing the mounting structure of the piezoelectric vibrator. As mentioned above, the piezoelectric vibrator is made of nichrome (about 500 mm thick) on both sides of the substrate 1 made of piezoelectric crystal or piezoelectric ceramic.
The thickness is 1000~5 with Ni-Cr) film as the base layer.
Electrodes 2 made of a gold (Au) film of 1,000 yen are each patterned with electrode lead-out portions 3 in opposite directions.
かかる圧電振動子の装着法としてはアルミナなどからな
る磁器基板４の上にパラジウム・１１（Ｐｄ・Ａｇ）な
どの導体ペーストをスクリーン印刷して形成した導体パ
ターン５の上に導電性樹脂６を用いて接着し導通をとる
方法がとられている。A method for mounting such a piezoelectric vibrator is to use a conductive resin 6 on a conductive pattern 5 formed by screen printing a conductive paste such as palladium-11 (Pd-Ag) on a ceramic substrate 4 made of alumina or the like. The method used is to glue the wires together to establish continuity.
ここで、電極取り出し部３は斜め蒸着法を用いて基板ｌ
の端面７にも設けている場合もある。Here, the electrode extraction portion 3 is formed on the substrate l using an oblique evaporation method.
In some cases, it is also provided on the end face 7 of the.
然し、基板１の端面７は直角に切り出されているために
導通が不完全で断線状態になり易く、導電性樹脂６を用
いて導体パターン５と接着しても、樹脂の流れ出しやエ
ツジ部の表面張力により電気抵抗が増大すると云う問題
があり、損失増加の原因となっていた。However, since the end surface 7 of the substrate 1 is cut out at right angles, the conduction is incomplete and the wire is easily disconnected, and even if the conductive resin 6 is used to bond the conductor pattern 5, the resin may flow out or the edges may be damaged. There is a problem in that electrical resistance increases due to surface tension, which causes increased loss.
〔発明が解決しようとする問題点〕
以上記したように圧電振動子は対向して設けられている
電極２からそれぞれ反対方向に設けられている電極取り
出し部３を導電性樹脂６により磁器基板４の導体パター
ン５と導通させる方法がとられているが、エツジ部での
電気抵抗の上昇が起こり易いことが問題である。[Problems to be Solved by the Invention] As described above, in the piezoelectric vibrator, the electrode extraction portions 3 provided in opposite directions from the electrodes 2 provided oppositely are connected to the ceramic substrate 4 using the conductive resin 6. However, the problem is that electrical resistance tends to increase at the edge portions.
上記の問題は電極取り出し部を備えた少なくとも一方の
端部が弯曲した端面を備えて形成されると共に、この電
極取り出し位置に金属膜を設けた構造をとる圧電振動子
により解決することができる。The above-mentioned problem can be solved by a piezoelectric vibrator having a structure in which at least one end portion with an electrode extraction portion is formed with a curved end face, and a metal film is provided at the electrode extraction position.
本発明は上記の問題を解決する方法として電極取り出し
部３を設ける少なくとも一方の端面７を研磨して弯曲し
た端面を形成し、この弯曲部にまで電極取り出し用の電
極膜を設けるもので、第１図はかかる圧電振動子の構造
を示している。The present invention solves the above problem by polishing at least one end surface 7 on which the electrode extraction portion 3 is provided to form a curved end surface, and providing an electrode film for electrode extraction even on this curved portion. Figure 1 shows the structure of such a piezoelectric vibrator.
すなわち、基板１の少なくとも一方を研磨して丸みをも
たせた弯曲端面８の上にまで蒸着膜をパターン形成する
ことにより上記の問題を無くするものである。That is, the above-mentioned problem is eliminated by forming a pattern of the deposited film even on the curved end surface 8, which has been rounded by polishing at least one side of the substrate 1.
ここで弯曲端面８の形成は電極取り出し部３が設けられ
る表裏面に必ずしも形成する必要はなく、上部電極の取
り出し部３が設けられている端面だけで足りる。Here, the curved end surface 8 does not necessarily need to be formed on the front and back surfaces where the electrode extraction portion 3 is provided, and it is sufficient to form the curved end surface 8 only on the end surface where the upper electrode extraction portion 3 is provided.
この理由は第４図において、下部電極の電極取り出し部
は導電性樹脂を用いて磁器基板４の導体パターン５に接
着固定を兼ねて導通させる構成をとっていることによる
。The reason for this is that, in FIG. 4, the electrode lead-out portion of the lower electrode is configured to be electrically connected to the conductive pattern 5 of the ceramic substrate 4 by using a conductive resin, which also serves as adhesive fixation.
圧電基板としてＬｉＮｂＯ５を用い、多数枚の形成が可
能な寸法に切り出した後、圧電振動子の電極取り出し部
が形成される予定の端面を一括して研磨し、端面を弯曲
させた。LiNbO5 was used as the piezoelectric substrate, and after it was cut out to a size that allowed for the formation of a large number of pieces, the end face where the electrode extraction portion of the piezoelectric vibrator was to be formed was polished all at once to curve the end face.
ここで弯曲端面の形成にはテープ研磨法とグラインダー
法の両者を使用した。Here, both the tape polishing method and the grinder method were used to form the curved end surface.
第２図はテープ研磨法の説明図であって、砥粒を塗布し
たテープ９が二個のローラ１０を用いて交互に巻き取ら
れながら往復運動するよう構成されている。FIG. 2 is an explanatory view of the tape polishing method, in which a tape 9 coated with abrasive grains is configured to reciprocate while being wound alternately using two rollers 10.
また、二個のローラ１０を結ぶ中間部には基板１の保持
具があり、点線で示すように首振り運動をするようにな
っている。Further, there is a holder for the substrate 1 at the intermediate portion connecting the two rollers 10, and it is designed to swing as shown by the dotted line.
このような装置を用いてＬｉＮｂ０ｚ基板の端面研磨を
行った。The end face of the LiNb0z substrate was polished using such an apparatus.
また、第３図はグラインダ法を説明するもので、グライ
ンダ１１の中央部が一定の曲率をもって窪んで形成され
ており、この凹部に基板１を接触させて研磨を行った。Further, FIG. 3 explains the grinder method, in which the central part of the grinder 11 is formed with a recess having a certain curvature, and the substrate 1 is brought into contact with this recess for polishing.
このようにして弯曲端面８をもつ基板を作り、これを切
り出して複数個の個片を作り、以後従来と同様にマスク
蒸着法により約５００人の厚さのＮｉ・Ｃｒ膜と約３０
００人のＡｕ膜とを形成てして電極２と取り出し電極３
を形成した。In this way, a substrate with a curved end surface 8 is made, and this is cut out to make a plurality of individual pieces.Then, as in the conventional method, a Ni/Cr film with a thickness of about 500 mm and a Ni/Cr film with a thickness of about 30 mm are deposited using a mask vapor deposition method as in the past.
The electrode 2 and the extraction electrode 3 are formed by forming an Au film of 0.00 people.
was formed.
そして導電性樹脂を用いて電極取り出し部３を磁器基板
４の導体パターン５に接着した。Then, the electrode extraction portion 3 was adhered to the conductor pattern 5 of the ceramic substrate 4 using a conductive resin.
このようにして形成した圧電振動子の導通は完全であり
、従来のような損失の増加は認められない。The piezoelectric vibrator thus formed has complete conduction, and no increase in loss is observed as in the conventional piezoelectric vibrator.
以上記したように本発明の実施により断線や特性の変動
の少ない圧電振動子を形成することができ、これにより
信頼性の向上が可能となる。As described above, by carrying out the present invention, it is possible to form a piezoelectric vibrator with less disconnection and less variation in characteristics, thereby making it possible to improve reliability.
第１図は本発明に係る圧電振動子の斜視図、第２図はテ
ープ研磨法の説明図、
第３図はグラインダ法の説明図、
第４図は圧電振動子の従来の装着構造を示す斜視図、
である。
図において、
１は基板、 ２は電極、３は電極取り出
し部、 ４は磁器基板、６は導電性樹脂、 ７
は端面、
８は弯曲端面、
である。Fig. 1 is a perspective view of a piezoelectric vibrator according to the present invention, Fig. 2 is an explanatory diagram of a tape polishing method, Fig. 3 is an explanatory diagram of a grinder method, and Fig. 4 is a conventional mounting structure of a piezoelectric vibrator. This is a perspective view. In the figure, 1 is a substrate, 2 is an electrode, 3 is an electrode extraction part, 4 is a ceramic substrate, 6 is a conductive resin, 7
is an end face, 8 is a curved end face, and .
Claims (1)
向して金属膜電極があり、該電極より互いに反対方向に
電極取り出し部を設けてなる振動子において、 電極取り出し部を備えた少なくとも一方の端部が弯曲し
た端面を備えて形成されると共に、該端面の電極取り出
し位置に金属膜を設けてなることを特徴とする圧電振動
子。[Claims] A vibrator comprising metal film electrodes facing each other on both sides of a diaphragm made of a piezoelectric crystal or piezoelectric ceramic, and electrode extraction portions provided in opposite directions from the electrodes, the electrode extraction portions being provided in opposite directions. A piezoelectric vibrator characterized in that at least one end thereof is formed with a curved end face, and a metal film is provided at an electrode extraction position of the end face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16495686A JPS6319907A (en) | 1986-07-14 | 1986-07-14 | Piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16495686A JPS6319907A (en) | 1986-07-14 | 1986-07-14 | Piezoelectric vibrator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6319907A true JPS6319907A (en) | 1988-01-27 |
Family
ID=15803058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16495686A Pending JPS6319907A (en) | 1986-07-14 | 1986-07-14 | Piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6319907A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02285706A (en) * | 1989-04-26 | 1990-11-26 | Fujitsu Ltd | Vibrator application device |
| EP0620048A2 (en) * | 1993-04-12 | 1994-10-19 | Acuson Corporation | Ultrasound transducers with reduced sidelobes and method for manufacture thereof |
-
1986
- 1986-07-14 JP JP16495686A patent/JPS6319907A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02285706A (en) * | 1989-04-26 | 1990-11-26 | Fujitsu Ltd | Vibrator application device |
| EP0620048A2 (en) * | 1993-04-12 | 1994-10-19 | Acuson Corporation | Ultrasound transducers with reduced sidelobes and method for manufacture thereof |
| EP0620048A3 (en) * | 1993-04-12 | 1995-11-29 | Acuson | Ultrasound transducers with reduced sidelobes and method for manufacture thereof. |
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