JPS63198997U - - Google Patents

Info

Publication number
JPS63198997U
JPS63198997U JP9010287U JP9010287U JPS63198997U JP S63198997 U JPS63198997 U JP S63198997U JP 9010287 U JP9010287 U JP 9010287U JP 9010287 U JP9010287 U JP 9010287U JP S63198997 U JPS63198997 U JP S63198997U
Authority
JP
Japan
Prior art keywords
closed container
container
introduction device
sealed
power introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9010287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9010287U priority Critical patent/JPS63198997U/ja
Publication of JPS63198997U publication Critical patent/JPS63198997U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
JP9010287U 1987-06-11 1987-06-11 Pending JPS63198997U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9010287U JPS63198997U (enrdf_load_stackoverflow) 1987-06-11 1987-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9010287U JPS63198997U (enrdf_load_stackoverflow) 1987-06-11 1987-06-11

Publications (1)

Publication Number Publication Date
JPS63198997U true JPS63198997U (enrdf_load_stackoverflow) 1988-12-21

Family

ID=30949667

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9010287U Pending JPS63198997U (enrdf_load_stackoverflow) 1987-06-11 1987-06-11

Country Status (1)

Country Link
JP (1) JPS63198997U (enrdf_load_stackoverflow)

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