JPS63198249A - Sem stereo-display device - Google Patents

Abstract

PURPOSE:To obtain the stereo-display effect by alternately displaying signals from two detectors on a screen and repeating the transmission and cutoff of the light of filters for the right and left eyes synchronously with it. CONSTITUTION:The reflected electron intensity from two detectors 81, 82 arranged at a fixed angle is intensity-modulated via a detecting/amplifying system 11 and alternately displayed on a CRT 10. A filter cutting off or transmitting the light by the application of voltage is used as the lens of spectacles 14. For one screen scan on the CRT 10, the light is transmitted only through the right-side filter, for example, end for the next screen scan, the light is transmitted only through the left-side filter. Thereby, only the light transmitted through the filter synchronously with respective screens of the detectors 81, 82 enters the eyes. The detector 81, 82 are arranged at the angular arrangement corresponding to positions of the right and left eyes. Accordingly, the displayed image can obtain the stereo-effect.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is applied to a scanning electron microscope (scanr+rng El
ectronprobe MiCrOanalyZer
, hereinafter abbreviated as SEM).

[Prior art] SEM is a system in which a finely focused electron beam is irradiated onto the surface of a sample using an electron lens, etc., and secondary electrons, reflected electrons, or This device detects absorbed electrons and transmitted electrons in a sample to observe the surface and internal structure of the sample. Figure 2 shows the conventional S
FIG. 2 is a theoretical configuration diagram showing an example of EM. The left side of the figure is an irradiation system, and the inside of the apparatus is kept at a vacuum of about 10-5 Torr by a vacuum pump 1 installed at the bottom to handle electron beams. Electrons generated by an electron gun composed of a filament 2 and Wehnelt 3 are accelerated to several tens of KeV by an anode 4, narrowed down by a focusing lens 5 and an objective lens 6, and irradiated onto a sample 9. An electron beam scanning coil 7 is attached to irradiate a desired position on the sample 15. To obtain an electron beam image of a sample using the SEM irradiation device configured as described above, the electron beam is swept over a certain area on the sample like a raster on a television, and the sweep is synchronous with this. If we modulate the brightness of the raster on the CRT with the intensity of the electrons detected by the detector 8, we get
An electron beam image corresponding to the shape of the sample surface can be obtained. The electron beam scanning system consists of a scanning coil 7 that scans the electron beam onto the sample surface, its electronic scanning circuit 9, and a CR that sweeps in synchronization with the scanning coil 7.
It consists of a detection amplification system 11 that detects information from the TIO and the sample surface and modulates the brightness of the CRT. Other main components include a high voltage generation circuit 12 that generates high voltage between the filament 2 and Wehnelt 3, a lens excitation power supply circuit 13 that supplies current to the focusing lens 5 and the objective lens 6, and the like.

With the configuration described above, mainly secondary electrons and reflected electrons are detected. In the case of secondary electron detection, an electrode called a focusing electrode that is kept at a positive potential with respect to the sample is placed between the sample and the detector, and the secondary electrons emitted from the sample surface by this electric field are Regardless of the direction of the radiation, it is mostly attracted towards the focusing electrode and detected. As a result, the secondary electron image becomes an image of shadowless illumination with illumination light coming from all directions and no shadows. In the case of detecting backscattered electrons, since they have a large energy key, there is no need for a focusing electrode like in the case of secondary electron detection, and only the backscattered electrons emitted from the sample in the direction of the detector are detected. The electron image appears to be irradiated from the direction of the detector, and the unevenness of the sample creates a sharp contrast.

[Problems to be Solved by the Invention] In the conventional SEM described above, only one detector is installed, so especially for backscattered electron images, it is difficult to observe the image from a single direction in a flat manner similar to that observed with a monocular camera. All I could get was a statue.

[Means for Solving the Problems] The present invention arranges two electron detectors at a predetermined angle with respect to the sample, and sweeps an electron beam over the sample surface to detect the reflections detected by each of the detectors. CR by brightness modulating electron intensity
A mechanism that alternately displays raster images one screen at a time on T, and two filters that have the function of transmitting or blocking light by applying a voltage are arranged in the glasses structure, and the two filters have a mechanism for transmitting and blocking light. This is a SEM stereoscopic display device characterized by comprising a mechanism for switching the cycle in synchronization with alternate raster display on a CRT.

[Function] The gist of the present invention is to modulate the intensity of reflected electrons detected by two detectors arranged at a constant angle and alternately display them on a CRT. By switching the period of an optical filter that is placed in the structure of the glasses and has the function of transmitting and blocking light by applying an electric field in synchronization with the In addition, the image obtained by the other detector is configured so that it can be seen only from the left eye, and the electron beam is scanned so that one period of the raster on the sample is shorter than the afterimage time of the eye. The same stereoscopic effect as viewing one sample with both eyes can be obtained.

[Example] Next, the present invention will be explained with reference to FIG.

FIG. 1 is a diagram showing the basic configuration of an embodiment of the present invention.

Components that are the same as those in the conventional example are given the same reference numerals as in FIG. 2, and their explanations will be omitted.

In FIG. 1, the detectors 81 and 82 are arranged in an 1800 angle arrangement, but in an actual configuration the angles between them may be of any size and can be changed to any size. The device itself may have the mechanism.

The signals from each detector 81 and 82 are amplified by the detection amplification system 11, and their intensity is luminance-modulated and transmitted to the CRT.
displayed above. At that time, the change in signal intensity during the sweep of the electron beam on the sample 15 is determined by the signal of only the detector 81 being brightness-modulated and displayed on the CRTIO, and the change in signal intensity during the next sweep of the electron beam on the sample 15 is displayed on the CRTIO. The change is configured such that the signal of only the detector 82 is intensity-modulated and displayed on the CRTIO.

On the other hand, a filter that transmits or blocks light by applying a voltage is a material such as liquid crystal that changes physical properties such as crystal orientation when a voltage is applied, and can transmit or block light. However, considering the afterimage time of the eye, which will be described later, the reaction time required for the physical properties to change in response to the application of voltage is at least 1740.
Must be shorter than seconds. Glasses 14 are constructed by using this filter as a mesh lens and integrating it with a glasses frame. The filter scans one screen on the CRT (for example, for non-screens, only the right filter is operated to transmit light, and for the next one screen scan on the CRT, only the left filter is transmitted). This allows only the light that has passed through the filter to enter the eye in synchronization with the respective screens of each detector 81 and 82.The detectors are also placed at the positions of the left and right eyes. Since they are configured with corresponding angular configurations, the resulting image will have a three-dimensional effect.

One screen scan requires an eye afterimage time of approximately 1720 seconds, and both signals from each detector must be displayed, so one screen scan must be performed at a cycle shorter than approximately 1740 seconds. There is. This can be done by using conventional television scanning technology. In accordance with this, the filter is also configured to have a function of switching between transmitting and blocking light in a shorter time in response to a screen that changes at a time period shorter than 1740 seconds.

[Effects of the Invention] As explained above, in the present invention, the signals from the two detectors are alternately displayed on the screen, and in synchronization with the signals, the filters for the left and right eyes repeat the transmission and blocking of light. There is an effect that a three-dimensional image display effect can be obtained.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the basic configuration of an embodiment of the present invention, and FIG. 2 is a diagram showing the basic configuration of a conventional SEM stereoscopic display device. 1... Vacuum pump 2... Filament 3
...Wehnelt 4...Anode 5...Focusing lens 6...Objective lens 7...Scanning coil 8.81.82...Detector 9...Electronic scanning circuit 10...CRTll. ...Detection amplification system 12...High voltage generation circuit 13...Lens excitation power supply circuit 14...Glasses 15...Sample

Claims (1)

[Claims] (1) Two electron detectors are placed at a predetermined angle with respect to the sample, and by sweeping an electron beam over the sample surface, the intensity of the reflected electrons detected by each of the detectors is modulated in brightness, and the CRT
A mechanism that alternately displays raster images one screen at a time on the top, and two filters that have the function of transmitting or blocking light by applying voltage are arranged in the glasses structure, and the period of light transmission and blocking of these two filters A SEM stereoscopic display device characterized by comprising: a mechanism for switching in synchronization with alternating raster display on a CRT.