JPS6319813B2 - - Google Patents
Info
- Publication number
- JPS6319813B2 JPS6319813B2 JP55164060A JP16406080A JPS6319813B2 JP S6319813 B2 JPS6319813 B2 JP S6319813B2 JP 55164060 A JP55164060 A JP 55164060A JP 16406080 A JP16406080 A JP 16406080A JP S6319813 B2 JPS6319813 B2 JP S6319813B2
- Authority
- JP
- Japan
- Prior art keywords
- fluorine
- space
- gas
- fluorine atoms
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 24
- 125000001153 fluoro group Chemical group F* 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 15
- 229910052731 fluorine Inorganic materials 0.000 claims description 15
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 14
- 239000011737 fluorine Substances 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 230000005855 radiation Effects 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 29
- 239000000460 chlorine Substances 0.000 description 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 238000004020 luminiscence type Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 150000001804 chlorine Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 235000012771 pancakes Nutrition 0.000 description 1
- 238000006303 photolysis reaction Methods 0.000 description 1
- 230000015843 photosynthesis, light reaction Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/76—Chemiluminescence; Bioluminescence
- G01N21/766—Chemiluminescence; Bioluminescence of gases
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/19—Halogen containing
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7908560A NL7908560A (nl) | 1979-11-26 | 1979-11-26 | Werkwijze voor het bepalen van fluor. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5687847A JPS5687847A (en) | 1981-07-16 |
| JPS6319813B2 true JPS6319813B2 (show.php) | 1988-04-25 |
Family
ID=19834235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16406080A Granted JPS5687847A (en) | 1979-11-26 | 1980-11-22 | Flourine measuring method |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4666857A (show.php) |
| JP (1) | JPS5687847A (show.php) |
| CA (1) | CA1146768A (show.php) |
| DE (1) | DE3043619C2 (show.php) |
| FR (1) | FR2470378A1 (show.php) |
| GB (1) | GB2064110B (show.php) |
| IT (1) | IT1134420B (show.php) |
| NL (1) | NL7908560A (show.php) |
-
1979
- 1979-11-26 NL NL7908560A patent/NL7908560A/nl not_active Application Discontinuation
-
1980
- 1980-11-19 DE DE3043619A patent/DE3043619C2/de not_active Expired
- 1980-11-20 CA CA000365104A patent/CA1146768A/en not_active Expired
- 1980-11-21 IT IT26174/80A patent/IT1134420B/it active
- 1980-11-21 GB GB8037429A patent/GB2064110B/en not_active Expired
- 1980-11-22 JP JP16406080A patent/JPS5687847A/ja active Granted
- 1980-11-26 FR FR8025083A patent/FR2470378A1/fr active Granted
-
1983
- 1983-01-12 US US06/457,323 patent/US4666857A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| GB2064110A (en) | 1981-06-10 |
| GB2064110B (en) | 1983-11-16 |
| FR2470378A1 (fr) | 1981-05-29 |
| NL7908560A (nl) | 1981-06-16 |
| DE3043619A1 (de) | 1981-08-27 |
| IT1134420B (it) | 1986-08-13 |
| DE3043619C2 (de) | 1985-01-03 |
| US4666857A (en) | 1987-05-19 |
| JPS5687847A (en) | 1981-07-16 |
| IT8026174A0 (it) | 1980-11-21 |
| CA1146768A (en) | 1983-05-24 |
| FR2470378B1 (show.php) | 1984-01-13 |
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