JPS63197272U - - Google Patents
Info
- Publication number
- JPS63197272U JPS63197272U JP8921487U JP8921487U JPS63197272U JP S63197272 U JPS63197272 U JP S63197272U JP 8921487 U JP8921487 U JP 8921487U JP 8921487 U JP8921487 U JP 8921487U JP S63197272 U JPS63197272 U JP S63197272U
- Authority
- JP
- Japan
- Prior art keywords
- step chain
- substrate
- cleaning device
- entrance
- exit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 2
Landscapes
- Escalators And Moving Walkways (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8921487U JPH0512222Y2 (pl) | 1987-06-10 | 1987-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8921487U JPH0512222Y2 (pl) | 1987-06-10 | 1987-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63197272U true JPS63197272U (pl) | 1988-12-19 |
| JPH0512222Y2 JPH0512222Y2 (pl) | 1993-03-29 |
Family
ID=30947998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8921487U Expired - Lifetime JPH0512222Y2 (pl) | 1987-06-10 | 1987-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0512222Y2 (pl) |
-
1987
- 1987-06-10 JP JP8921487U patent/JPH0512222Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0512222Y2 (pl) | 1993-03-29 |