JPS63197272U - - Google Patents

Info

Publication number
JPS63197272U
JPS63197272U JP8921487U JP8921487U JPS63197272U JP S63197272 U JPS63197272 U JP S63197272U JP 8921487 U JP8921487 U JP 8921487U JP 8921487 U JP8921487 U JP 8921487U JP S63197272 U JPS63197272 U JP S63197272U
Authority
JP
Japan
Prior art keywords
step chain
substrate
cleaning device
entrance
exit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8921487U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0512222Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8921487U priority Critical patent/JPH0512222Y2/ja
Publication of JPS63197272U publication Critical patent/JPS63197272U/ja
Application granted granted Critical
Publication of JPH0512222Y2 publication Critical patent/JPH0512222Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Escalators And Moving Walkways (AREA)
JP8921487U 1987-06-10 1987-06-10 Expired - Lifetime JPH0512222Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8921487U JPH0512222Y2 (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8921487U JPH0512222Y2 (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Publications (2)

Publication Number Publication Date
JPS63197272U true JPS63197272U (enrdf_load_stackoverflow) 1988-12-19
JPH0512222Y2 JPH0512222Y2 (enrdf_load_stackoverflow) 1993-03-29

Family

ID=30947998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8921487U Expired - Lifetime JPH0512222Y2 (enrdf_load_stackoverflow) 1987-06-10 1987-06-10

Country Status (1)

Country Link
JP (1) JPH0512222Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0512222Y2 (enrdf_load_stackoverflow) 1993-03-29

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