JPS63197062U - - Google Patents

Info

Publication number
JPS63197062U
JPS63197062U JP8749987U JP8749987U JPS63197062U JP S63197062 U JPS63197062 U JP S63197062U JP 8749987 U JP8749987 U JP 8749987U JP 8749987 U JP8749987 U JP 8749987U JP S63197062 U JPS63197062 U JP S63197062U
Authority
JP
Japan
Prior art keywords
chamfering
fine
whetstone
grinding
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8749987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8749987U priority Critical patent/JPS63197062U/ja
Publication of JPS63197062U publication Critical patent/JPS63197062U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
JP8749987U 1987-06-08 1987-06-08 Pending JPS63197062U (US07993877-20110809-P00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8749987U JPS63197062U (US07993877-20110809-P00003.png) 1987-06-08 1987-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8749987U JPS63197062U (US07993877-20110809-P00003.png) 1987-06-08 1987-06-08

Publications (1)

Publication Number Publication Date
JPS63197062U true JPS63197062U (US07993877-20110809-P00003.png) 1988-12-19

Family

ID=30944768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8749987U Pending JPS63197062U (US07993877-20110809-P00003.png) 1987-06-08 1987-06-08

Country Status (1)

Country Link
JP (1) JPS63197062U (US07993877-20110809-P00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103394982A (zh) * 2013-08-20 2013-11-20 中国电子科技集团公司第四十六研究所 一种加工厚层外延用硅单晶片的倒角砂轮及倒角方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629097U (US07993877-20110809-P00003.png) * 1979-08-07 1981-03-19
JPS58160050A (ja) * 1982-03-15 1983-09-22 Fujikoshi Kikai Kogyo Kk ウエハ−の面取り加工法およびこれに使用する砥石

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629097U (US07993877-20110809-P00003.png) * 1979-08-07 1981-03-19
JPS58160050A (ja) * 1982-03-15 1983-09-22 Fujikoshi Kikai Kogyo Kk ウエハ−の面取り加工法およびこれに使用する砥石

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103394982A (zh) * 2013-08-20 2013-11-20 中国电子科技集团公司第四十六研究所 一种加工厚层外延用硅单晶片的倒角砂轮及倒角方法
CN103394982B (zh) * 2013-08-20 2015-07-29 中国电子科技集团公司第四十六研究所 一种加工厚层外延用硅单晶片的倒角砂轮及倒角方法

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