JPS63196362U - - Google Patents

Info

Publication number

JPS63196362U

JPS63196362U JP8658287U JP8658287U JPS63196362U JP S63196362 U JPS63196362 U JP S63196362U JP 8658287 U JP8658287 U JP 8658287U JP 8658287 U JP8658287 U JP 8658287U JP S63196362 U JPS63196362 U JP S63196362U

Authority

JP

Japan

Prior art keywords

vapor phase

phase heating

heating device

partition

solution

Prior art date

1987-06-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 238000010438 heat treatment Methods 0.000 claims description 10
• 239000012808 vapor phase Substances 0.000 claims description 10
• 238000005192 partition Methods 0.000 claims description 5
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
• 229910052731 fluorine Inorganic materials 0.000 claims 1
• 239000011737 fluorine Substances 0.000 claims 1
• 230000008016 vaporization Effects 0.000 claims 1
• 238000009834 vaporization Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3