JPS63195735U - - Google Patents
Info
- Publication number
- JPS63195735U JPS63195735U JP8686287U JP8686287U JPS63195735U JP S63195735 U JPS63195735 U JP S63195735U JP 8686287 U JP8686287 U JP 8686287U JP 8686287 U JP8686287 U JP 8686287U JP S63195735 U JPS63195735 U JP S63195735U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- transported
- silicon
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8686287U JPS63195735U (ro) | 1987-06-04 | 1987-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8686287U JPS63195735U (ro) | 1987-06-04 | 1987-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195735U true JPS63195735U (ro) | 1988-12-16 |
Family
ID=30943561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8686287U Pending JPS63195735U (ro) | 1987-06-04 | 1987-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195735U (ro) |
-
1987
- 1987-06-04 JP JP8686287U patent/JPS63195735U/ja active Pending