JPS63195722U - - Google Patents

Info

Publication number
JPS63195722U
JPS63195722U JP8730587U JP8730587U JPS63195722U JP S63195722 U JPS63195722 U JP S63195722U JP 8730587 U JP8730587 U JP 8730587U JP 8730587 U JP8730587 U JP 8730587U JP S63195722 U JPS63195722 U JP S63195722U
Authority
JP
Japan
Prior art keywords
boat
exhaust pipe
support member
core tube
furnace core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8730587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8730587U priority Critical patent/JPS63195722U/ja
Publication of JPS63195722U publication Critical patent/JPS63195722U/ja
Pending legal-status Critical Current

Links

JP8730587U 1987-06-05 1987-06-05 Pending JPS63195722U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8730587U JPS63195722U (US20030199744A1-20031023-C00003.png) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8730587U JPS63195722U (US20030199744A1-20031023-C00003.png) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63195722U true JPS63195722U (US20030199744A1-20031023-C00003.png) 1988-12-16

Family

ID=30944388

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8730587U Pending JPS63195722U (US20030199744A1-20031023-C00003.png) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63195722U (US20030199744A1-20031023-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11233505A (ja) * 1998-02-13 1999-08-27 Tokyo Electron Ltd 排気装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11233505A (ja) * 1998-02-13 1999-08-27 Tokyo Electron Ltd 排気装置

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