JPS63195720U - - Google Patents

Info

Publication number
JPS63195720U
JPS63195720U JP8763287U JP8763287U JPS63195720U JP S63195720 U JPS63195720 U JP S63195720U JP 8763287 U JP8763287 U JP 8763287U JP 8763287 U JP8763287 U JP 8763287U JP S63195720 U JPS63195720 U JP S63195720U
Authority
JP
Japan
Prior art keywords
boat
semiconductor wafer
position adjustment
cassette
adjustment jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8763287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8763287U priority Critical patent/JPS63195720U/ja
Publication of JPS63195720U publication Critical patent/JPS63195720U/ja
Pending legal-status Critical Current

Links

JP8763287U 1987-06-05 1987-06-05 Pending JPS63195720U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8763287U JPS63195720U (US07709020-20100504-C00041.png) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8763287U JPS63195720U (US07709020-20100504-C00041.png) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63195720U true JPS63195720U (US07709020-20100504-C00041.png) 1988-12-16

Family

ID=30945019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8763287U Pending JPS63195720U (US07709020-20100504-C00041.png) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63195720U (US07709020-20100504-C00041.png)

Similar Documents

Publication Publication Date Title
JPS63195720U (US07709020-20100504-C00041.png)
JPS63194835U (US07709020-20100504-C00041.png)
JPS6331536U (US07709020-20100504-C00041.png)
JPS6322740U (US07709020-20100504-C00041.png)
JPH03128943U (US07709020-20100504-C00041.png)
JPS63195734U (US07709020-20100504-C00041.png)
JPS60927U (ja) 半導体ウエハ貼付装置
JPH01161334U (US07709020-20100504-C00041.png)
JPS59115648U (ja) 半導体ウエハ移替装置
JPH0412647U (US07709020-20100504-C00041.png)
JPS59111042U (ja) 半導体製造装置
JPH0328735U (US07709020-20100504-C00041.png)
JPH01165646U (US07709020-20100504-C00041.png)
JPS63172612U (US07709020-20100504-C00041.png)
JPS63164229U (US07709020-20100504-C00041.png)
JPH0193736U (US07709020-20100504-C00041.png)
JPH0363937U (US07709020-20100504-C00041.png)
JPS63157939U (US07709020-20100504-C00041.png)
JPS6441130U (US07709020-20100504-C00041.png)
JPS6433746U (US07709020-20100504-C00041.png)
JPS60169838U (ja) 半導体製造装置
JPH1050793A (ja) ウェーハ搬送装置
JPH01167046U (US07709020-20100504-C00041.png)
JPS63137938U (US07709020-20100504-C00041.png)
JPS6188233U (US07709020-20100504-C00041.png)