JPS6319564U - - Google Patents
Info
- Publication number
- JPS6319564U JPS6319564U JP11021886U JP11021886U JPS6319564U JP S6319564 U JPS6319564 U JP S6319564U JP 11021886 U JP11021886 U JP 11021886U JP 11021886 U JP11021886 U JP 11021886U JP S6319564 U JPS6319564 U JP S6319564U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- cathode
- housing
- plate
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11021886U JPH0311226Y2 (https=) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11021886U JPH0311226Y2 (https=) | 1986-07-18 | 1986-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6319564U true JPS6319564U (https=) | 1988-02-09 |
| JPH0311226Y2 JPH0311226Y2 (https=) | 1991-03-19 |
Family
ID=30989037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11021886U Expired JPH0311226Y2 (https=) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311226Y2 (https=) |
-
1986
- 1986-07-18 JP JP11021886U patent/JPH0311226Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311226Y2 (https=) | 1991-03-19 |