JPS6319563U - - Google Patents
Info
- Publication number
- JPS6319563U JPS6319563U JP10969286U JP10969286U JPS6319563U JP S6319563 U JPS6319563 U JP S6319563U JP 10969286 U JP10969286 U JP 10969286U JP 10969286 U JP10969286 U JP 10969286U JP S6319563 U JPS6319563 U JP S6319563U
- Authority
- JP
- Japan
- Prior art keywords
- cooling medium
- port
- communicating
- supply
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10969286U JPS6319563U (cs) | 1986-07-17 | 1986-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10969286U JPS6319563U (cs) | 1986-07-17 | 1986-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6319563U true JPS6319563U (cs) | 1988-02-09 |
Family
ID=30988020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10969286U Pending JPS6319563U (cs) | 1986-07-17 | 1986-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6319563U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176144U (cs) * | 1984-10-25 | 1986-05-22 |
-
1986
- 1986-07-17 JP JP10969286U patent/JPS6319563U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6176144U (cs) * | 1984-10-25 | 1986-05-22 |
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