JPS63195572U - - Google Patents
Info
- Publication number
- JPS63195572U JPS63195572U JP8601387U JP8601387U JPS63195572U JP S63195572 U JPS63195572 U JP S63195572U JP 8601387 U JP8601387 U JP 8601387U JP 8601387 U JP8601387 U JP 8601387U JP S63195572 U JPS63195572 U JP S63195572U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- furnace
- units
- supply unit
- semiconductor substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000000376 reactant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8601387U JPS63195572U (enExample) | 1987-06-02 | 1987-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8601387U JPS63195572U (enExample) | 1987-06-02 | 1987-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195572U true JPS63195572U (enExample) | 1988-12-15 |
Family
ID=30941936
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8601387U Pending JPS63195572U (enExample) | 1987-06-02 | 1987-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195572U (enExample) |
-
1987
- 1987-06-02 JP JP8601387U patent/JPS63195572U/ja active Pending