JPS63195568U - - Google Patents

Info

Publication number
JPS63195568U
JPS63195568U JP8322787U JP8322787U JPS63195568U JP S63195568 U JPS63195568 U JP S63195568U JP 8322787 U JP8322787 U JP 8322787U JP 8322787 U JP8322787 U JP 8322787U JP S63195568 U JPS63195568 U JP S63195568U
Authority
JP
Japan
Prior art keywords
target
temperature
sputtering
cooling system
reactive sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8322787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8322787U priority Critical patent/JPS63195568U/ja
Publication of JPS63195568U publication Critical patent/JPS63195568U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8322787U 1987-06-01 1987-06-01 Pending JPS63195568U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8322787U JPS63195568U (enrdf_load_stackoverflow) 1987-06-01 1987-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8322787U JPS63195568U (enrdf_load_stackoverflow) 1987-06-01 1987-06-01

Publications (1)

Publication Number Publication Date
JPS63195568U true JPS63195568U (enrdf_load_stackoverflow) 1988-12-15

Family

ID=30936621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8322787U Pending JPS63195568U (enrdf_load_stackoverflow) 1987-06-01 1987-06-01

Country Status (1)

Country Link
JP (1) JPS63195568U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
ES482511A1 (es) Un metodo de acondicionar el aire contenido en un recinto.
JPS63195568U (enrdf_load_stackoverflow)
JPS5416836A (en) Method of controlling temperature and humidity
JPS6291167U (enrdf_load_stackoverflow)
JPH0418960U (enrdf_load_stackoverflow)
JPS6447033U (enrdf_load_stackoverflow)
JPS6335941U (enrdf_load_stackoverflow)
JPH0426357U (enrdf_load_stackoverflow)
JPS63199301U (enrdf_load_stackoverflow)
Sunahara et al. On a total electric power evaluation for refrigerator system with respect to the ambient temperature variations.
JPS6450605A (en) Amplifier
JPS629076U (enrdf_load_stackoverflow)
JPS5618246A (en) Controlling system of heating and cooling type air conditioner
JPS549442A (en) Device for controlling air conditioner
JPS62129799U (enrdf_load_stackoverflow)
JPS53105049A (en) Operation of air conditioner used for both cooling and heating purposes
JPS5561917A (en) Dehumidifying apparatus
JPS5813475U (ja) 冷蔵庫
SOHAL Scale-up methods for heat transfer models with coupled conduction, convection and radiation(Analysis of uniform heat energy generation and conduction heat transfer for semi-infinite thin plate with air blowing over one surface and insulated on other)[Ph. D. Thesis]
JPS61178893U (enrdf_load_stackoverflow)
JPS61169380U (enrdf_load_stackoverflow)
JPS5842935U (ja) 半導体製造装置
JPS5484641A (en) Defrosting controlling method
JPH0483126U (enrdf_load_stackoverflow)
JPS62143169U (enrdf_load_stackoverflow)