JPS63195567U - - Google Patents

Info

Publication number
JPS63195567U
JPS63195567U JP8661287U JP8661287U JPS63195567U JP S63195567 U JPS63195567 U JP S63195567U JP 8661287 U JP8661287 U JP 8661287U JP 8661287 U JP8661287 U JP 8661287U JP S63195567 U JPS63195567 U JP S63195567U
Authority
JP
Japan
Prior art keywords
workpiece
surface treatment
ring
holding part
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8661287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8661287U priority Critical patent/JPS63195567U/ja
Publication of JPS63195567U publication Critical patent/JPS63195567U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP8661287U 1987-06-05 1987-06-05 Pending JPS63195567U (US07534539-20090519-C00280.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8661287U JPS63195567U (US07534539-20090519-C00280.png) 1987-06-05 1987-06-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8661287U JPS63195567U (US07534539-20090519-C00280.png) 1987-06-05 1987-06-05

Publications (1)

Publication Number Publication Date
JPS63195567U true JPS63195567U (US07534539-20090519-C00280.png) 1988-12-15

Family

ID=30943079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8661287U Pending JPS63195567U (US07534539-20090519-C00280.png) 1987-06-05 1987-06-05

Country Status (1)

Country Link
JP (1) JPS63195567U (US07534539-20090519-C00280.png)

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