JPS63195564U - - Google Patents

Info

Publication number
JPS63195564U
JPS63195564U JP8604387U JP8604387U JPS63195564U JP S63195564 U JPS63195564 U JP S63195564U JP 8604387 U JP8604387 U JP 8604387U JP 8604387 U JP8604387 U JP 8604387U JP S63195564 U JPS63195564 U JP S63195564U
Authority
JP
Japan
Prior art keywords
container
lid
exhaust hole
sealing member
seals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8604387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8604387U priority Critical patent/JPS63195564U/ja
Publication of JPS63195564U publication Critical patent/JPS63195564U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8604387U 1987-06-02 1987-06-02 Pending JPS63195564U (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8604387U JPS63195564U (sv) 1987-06-02 1987-06-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8604387U JPS63195564U (sv) 1987-06-02 1987-06-02

Publications (1)

Publication Number Publication Date
JPS63195564U true JPS63195564U (sv) 1988-12-15

Family

ID=30941994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8604387U Pending JPS63195564U (sv) 1987-06-02 1987-06-02

Country Status (1)

Country Link
JP (1) JPS63195564U (sv)

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