JPS63195564U - - Google Patents
Info
- Publication number
- JPS63195564U JPS63195564U JP8604387U JP8604387U JPS63195564U JP S63195564 U JPS63195564 U JP S63195564U JP 8604387 U JP8604387 U JP 8604387U JP 8604387 U JP8604387 U JP 8604387U JP S63195564 U JPS63195564 U JP S63195564U
- Authority
- JP
- Japan
- Prior art keywords
- container
- lid
- exhaust hole
- sealing member
- seals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 6
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8604387U JPS63195564U (en:Method) | 1987-06-02 | 1987-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8604387U JPS63195564U (en:Method) | 1987-06-02 | 1987-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63195564U true JPS63195564U (en:Method) | 1988-12-15 |
Family
ID=30941994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8604387U Pending JPS63195564U (en:Method) | 1987-06-02 | 1987-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63195564U (en:Method) |
-
1987
- 1987-06-02 JP JP8604387U patent/JPS63195564U/ja active Pending