JPS63193844U - - Google Patents

Info

Publication number
JPS63193844U
JPS63193844U JP8533187U JP8533187U JPS63193844U JP S63193844 U JPS63193844 U JP S63193844U JP 8533187 U JP8533187 U JP 8533187U JP 8533187 U JP8533187 U JP 8533187U JP S63193844 U JPS63193844 U JP S63193844U
Authority
JP
Japan
Prior art keywords
support substrate
communicates
conductor layer
via holes
electrostatic chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8533187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8533187U priority Critical patent/JPS63193844U/ja
Publication of JPS63193844U publication Critical patent/JPS63193844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP8533187U 1987-05-30 1987-05-30 Pending JPS63193844U (US07368563-20080506-C00056.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8533187U JPS63193844U (US07368563-20080506-C00056.png) 1987-05-30 1987-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8533187U JPS63193844U (US07368563-20080506-C00056.png) 1987-05-30 1987-05-30

Publications (1)

Publication Number Publication Date
JPS63193844U true JPS63193844U (US07368563-20080506-C00056.png) 1988-12-14

Family

ID=30940641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8533187U Pending JPS63193844U (US07368563-20080506-C00056.png) 1987-05-30 1987-05-30

Country Status (1)

Country Link
JP (1) JPS63193844U (US07368563-20080506-C00056.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012142615A (ja) * 1999-02-17 2012-07-26 Applied Materials Inc 多層電極を有する薄板状セラミック及び製造方法
JP2015529968A (ja) * 2012-07-17 2015-10-08 エーエスエムエル ネザーランズ ビー.ブイ. 静電クランプ、リソグラフィ装置及び方法
JP2019204903A (ja) * 2018-05-24 2019-11-28 日本特殊陶業株式会社 電極埋設部材の製造方法
JP2019212668A (ja) * 2018-05-31 2019-12-12 日本特殊陶業株式会社 電極埋設部材

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012142615A (ja) * 1999-02-17 2012-07-26 Applied Materials Inc 多層電極を有する薄板状セラミック及び製造方法
JP2015529968A (ja) * 2012-07-17 2015-10-08 エーエスエムエル ネザーランズ ビー.ブイ. 静電クランプ、リソグラフィ装置及び方法
JP2019204903A (ja) * 2018-05-24 2019-11-28 日本特殊陶業株式会社 電極埋設部材の製造方法
JP2019212668A (ja) * 2018-05-31 2019-12-12 日本特殊陶業株式会社 電極埋設部材

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