JPS63193840U - - Google Patents
Info
- Publication number
- JPS63193840U JPS63193840U JP8345887U JP8345887U JPS63193840U JP S63193840 U JPS63193840 U JP S63193840U JP 8345887 U JP8345887 U JP 8345887U JP 8345887 U JP8345887 U JP 8345887U JP S63193840 U JPS63193840 U JP S63193840U
- Authority
- JP
- Japan
- Prior art keywords
- lifter
- wafer
- numbered
- transfer device
- odd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8345887U JPS63193840U (enExample) | 1987-05-31 | 1987-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8345887U JPS63193840U (enExample) | 1987-05-31 | 1987-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193840U true JPS63193840U (enExample) | 1988-12-14 |
Family
ID=30937063
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8345887U Pending JPS63193840U (enExample) | 1987-05-31 | 1987-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193840U (enExample) |
-
1987
- 1987-05-31 JP JP8345887U patent/JPS63193840U/ja active Pending