JPS63193655U - - Google Patents
Info
- Publication number
- JPS63193655U JPS63193655U JP8555287U JP8555287U JPS63193655U JP S63193655 U JPS63193655 U JP S63193655U JP 8555287 U JP8555287 U JP 8555287U JP 8555287 U JP8555287 U JP 8555287U JP S63193655 U JPS63193655 U JP S63193655U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- polishing tool
- grindstone
- deformable
- held
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8555287U JPS63193655U (zh) | 1987-06-02 | 1987-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8555287U JPS63193655U (zh) | 1987-06-02 | 1987-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193655U true JPS63193655U (zh) | 1988-12-13 |
Family
ID=30941062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8555287U Pending JPS63193655U (zh) | 1987-06-02 | 1987-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193655U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005533670A (ja) * | 2002-07-26 | 2005-11-10 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨製品、その製造方法および使用方法、ならびにその製造のための装置 |
-
1987
- 1987-06-02 JP JP8555287U patent/JPS63193655U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005533670A (ja) * | 2002-07-26 | 2005-11-10 | スリーエム イノベイティブ プロパティズ カンパニー | 研磨製品、その製造方法および使用方法、ならびにその製造のための装置 |
| JP2010188522A (ja) * | 2002-07-26 | 2010-09-02 | Three M Innovative Properties Co | 研磨製品、その製造方法および使用方法、ならびにその製造のための装置 |