JPS63193572U - - Google Patents

Info

Publication number
JPS63193572U
JPS63193572U JP5981487U JP5981487U JPS63193572U JP S63193572 U JPS63193572 U JP S63193572U JP 5981487 U JP5981487 U JP 5981487U JP 5981487 U JP5981487 U JP 5981487U JP S63193572 U JPS63193572 U JP S63193572U
Authority
JP
Japan
Prior art keywords
substrate
mounting table
shaping member
rotated
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5981487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5981487U priority Critical patent/JPS63193572U/ja
Priority to US07/176,864 priority patent/US4875434A/en
Publication of JPS63193572U publication Critical patent/JPS63193572U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP5981487U 1987-04-02 1987-04-20 Pending JPS63193572U (US07923587-20110412-C00022.png)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP5981487U JPS63193572U (US07923587-20110412-C00022.png) 1987-04-20 1987-04-20
US07/176,864 US4875434A (en) 1987-04-02 1988-04-01 Apparatus for coating a substrate with a coating material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5981487U JPS63193572U (US07923587-20110412-C00022.png) 1987-04-20 1987-04-20

Publications (1)

Publication Number Publication Date
JPS63193572U true JPS63193572U (US07923587-20110412-C00022.png) 1988-12-13

Family

ID=30891661

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5981487U Pending JPS63193572U (US07923587-20110412-C00022.png) 1987-04-02 1987-04-20

Country Status (1)

Country Link
JP (1) JPS63193572U (US07923587-20110412-C00022.png)

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