JPS63193340U - - Google Patents
Info
- Publication number
- JPS63193340U JPS63193340U JP8435887U JP8435887U JPS63193340U JP S63193340 U JPS63193340 U JP S63193340U JP 8435887 U JP8435887 U JP 8435887U JP 8435887 U JP8435887 U JP 8435887U JP S63193340 U JPS63193340 U JP S63193340U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- thickness measurement
- computer
- measurement sensor
- pinhole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims 3
- 230000007547 defect Effects 0.000 claims 1
- 238000009423 ventilation Methods 0.000 claims 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8435887U JPS63193340U (de) | 1987-05-31 | 1987-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8435887U JPS63193340U (de) | 1987-05-31 | 1987-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63193340U true JPS63193340U (de) | 1988-12-13 |
Family
ID=30938785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8435887U Pending JPS63193340U (de) | 1987-05-31 | 1987-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63193340U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60127438A (ja) * | 1983-12-13 | 1985-07-08 | Kishimoto Akira | 密封容器の漏洩検査方法及びその装置 |
| JPS60202342A (ja) * | 1984-03-27 | 1985-10-12 | Matsushita Refrig Co | 包装体の減圧度検査装置 |
-
1987
- 1987-05-31 JP JP8435887U patent/JPS63193340U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60127438A (ja) * | 1983-12-13 | 1985-07-08 | Kishimoto Akira | 密封容器の漏洩検査方法及びその装置 |
| JPS60202342A (ja) * | 1984-03-27 | 1985-10-12 | Matsushita Refrig Co | 包装体の減圧度検査装置 |