JPS63192656U - - Google Patents

Info

Publication number
JPS63192656U
JPS63192656U JP8385587U JP8385587U JPS63192656U JP S63192656 U JPS63192656 U JP S63192656U JP 8385587 U JP8385587 U JP 8385587U JP 8385587 U JP8385587 U JP 8385587U JP S63192656 U JPS63192656 U JP S63192656U
Authority
JP
Japan
Prior art keywords
movable body
movable
ultra
actuator
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8385587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546204Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8385587U priority Critical patent/JPH0546204Y2/ja
Publication of JPS63192656U publication Critical patent/JPS63192656U/ja
Application granted granted Critical
Publication of JPH0546204Y2 publication Critical patent/JPH0546204Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Control Of Position Or Direction (AREA)
JP8385587U 1987-05-29 1987-05-29 Expired - Lifetime JPH0546204Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8385587U JPH0546204Y2 (https=) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8385587U JPH0546204Y2 (https=) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192656U true JPS63192656U (https=) 1988-12-12
JPH0546204Y2 JPH0546204Y2 (https=) 1993-12-02

Family

ID=30937823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8385587U Expired - Lifetime JPH0546204Y2 (https=) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0546204Y2 (https=)

Also Published As

Publication number Publication date
JPH0546204Y2 (https=) 1993-12-02

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