JPS63192656U - - Google Patents

Info

Publication number
JPS63192656U
JPS63192656U JP8385587U JP8385587U JPS63192656U JP S63192656 U JPS63192656 U JP S63192656U JP 8385587 U JP8385587 U JP 8385587U JP 8385587 U JP8385587 U JP 8385587U JP S63192656 U JPS63192656 U JP S63192656U
Authority
JP
Japan
Prior art keywords
movable body
movable
ultra
actuator
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8385587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0546204Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8385587U priority Critical patent/JPH0546204Y2/ja
Publication of JPS63192656U publication Critical patent/JPS63192656U/ja
Application granted granted Critical
Publication of JPH0546204Y2 publication Critical patent/JPH0546204Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Control Of Position Or Direction (AREA)
JP8385587U 1987-05-29 1987-05-29 Expired - Lifetime JPH0546204Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8385587U JPH0546204Y2 (fr) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8385587U JPH0546204Y2 (fr) 1987-05-29 1987-05-29

Publications (2)

Publication Number Publication Date
JPS63192656U true JPS63192656U (fr) 1988-12-12
JPH0546204Y2 JPH0546204Y2 (fr) 1993-12-02

Family

ID=30937823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8385587U Expired - Lifetime JPH0546204Y2 (fr) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPH0546204Y2 (fr)

Also Published As

Publication number Publication date
JPH0546204Y2 (fr) 1993-12-02

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