JPS63192010A - Laser beam divider - Google Patents

Abstract

PURPOSE:To obtain a low-cost laser beam divider which has a simple constitution and is easy to produce, by forming a mirror with a reflection part and a transmission part consisting of plural holes at a proper rate. CONSTITUTION:A laser beam LB oscillated from a laser oscillator is made incident on a reflection part 13 of a mirror 11 in a laser beam divider 1 and is reflected. The laser beam LB is transmitted through plural holes in a transmission part 15 of the mirror 11 in the laser beam divider 1. Consequently, a ratio of the transmitted light to the reflected light is properly selected in accordance with a ratio of the transmission part to the reflection part, namely, a ratio of plural holes as the transmission part to the reflection part. Further, since plural holes are only provided in a conventional reflection mirror to obtain the mirror 11, the laser beam divider has the simple constitution and is easily produced with a low cost.

Description

[Detailed Description of the Invention] [Object of the Invention] (Industrial Application Field) The present invention relates to a laser beam splitting device that splits laser light emitted from a laser oscillator into reflected light and transmitted light at an appropriate ratio. .

(Conventional technology) Laser emission 1! When a laser beam emitted from a device is divided into a plurality of laser beams, a partial reflecting mirror (referred to as a beam splitter) such as a half mirror is generally used to divide the laser beam into reflected light and transmitted light.

For example, a semi-transparent mirror as a beam splitter! [Body-coated mirrors are mainly used efficiently.

(Problems to be Solved by the Invention) -By the way, as mentioned above, dielectric coated mirrors are mainly used as semitransparent mirrors that serve as beam splitters that split laser light into reflected light and transmitted light. However, when using this mirror with oblique incidence, the film material and number of layers must be selected based on not only the ratio of reflection and transmission, but also usage conditions such as wavelength, angle of incidence, and plane of polarization.

Therefore, in order to use a dielectric coated mirror as a beam splitter that splits laser light into reflected light and transmitted light at an appropriate ratio, the film material and number of layers must be selected and manufactured depending on the degree of splitting of the laser light. However, there were problems with optically complicated manufacturing labor and high cost.

The object of the present invention is to solve the above-mentioned problems by mechanically devising a conventional anti-mirror mirror, which has a simple configuration, which can be easily manufactured, and which can be manufactured at low cost using a laser-splitting v.
The purpose is to provide tW1.

[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, in the present invention, the optical path of the laser beam emitted from the laser oscillator has a structure that intersects with the optical axis of the laser beam. A laser beam splitting device was constructed by arranging and providing mirrors, each of which was formed of a reflecting portion and a transmitting portion consisting of a plurality of holes at an appropriate ratio.

(Function) By employing the laser beam splitting device of the present invention, the laser beam oscillated from the laser oscillator is incident on the reflection portion of the mirror in the laser beam splitting device and is reflected.

Further, the laser beam is transmitted through a plurality of holes in the transmitting portion of the mirror in the laser beam splitting device.

Therefore, the ratio of reflected light to transmitted light is appropriately selected depending on the ratio of the reflective part to the transmitting part, that is, the ratio of the plurality of holes serving as the transmitting part to the reflective part. Moreover, since the mirror is simply made by drilling a plurality of holes in a conventional reflecting mirror, the structure is simple, and the manufacturing process is simple and inexpensive.

(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

Referring to FIG. 1, the laser beam splitting device 1 includes a housing 3 with a hollow interior, and flat glass 5 is provided at the upper, lower and left side of the housing 3, respectively, for passing the laser beam LB. 7 and 9 are installed.

A laser beam LB emitted from a laser oscillator, not shown in FIG. For example, a semi-transmissive mirror 11 serving as a splitting mirror that transmits half of the laser beam LB is tilted at an angle of 45 degrees to the right with respect to the optical axis of the laser beam LB.
A: I am called.

That is, as shown in FIGS. 2 and 3, the semi-transmissive mirror 11 has a mirror surface portion 13 on the negative side, and the mirror surface portion 13 has a plurality of mirror surfaces parallel to the incident optical axis of the laser beam LB. A hole 15 is formed. Therefore, depending on the number and size of the plurality of holes 15 and the pitch between the holes 15, the semi-transmissive mirror 11 transmits half of the laser beam LB as transmitted light LB+, and also reflects the laser beam B as reflected light LB2. is formed.

A fluid port 17 is provided on the upper left shoulder of the housing 3 to forcibly cool the semi-transparent mirror 11 so as not to be affected by thermal deformation caused by the high-energy laser beam [B. A fluid outlet 19 is provided on the lower side of the right side.

With the above configuration, the laser beam LB oscillated from a laser oscillator (not shown) is incident from above as shown by the arrow in FIG. The light is transmitted downward through the hole 15 and the flat glass 7. Further, half of the light is reflected by the semi-transmissive mirror 11 as reflected light LB2 through the reflecting portion and the flat glass 9.

Note that the semi-transparent mirror 11 is forcibly cooled by being constantly supplied with fluid from the fluid port 17 and discharged from the fluid outlet 19, so that it does not undergo thermal deformation.

The mirror of the laser beam splitting device 1 has been described as a semi-transmissive mirror 11 that splits half of the laser beam LB into transmitted light LB1 and the other half into reflected light LB2. The ratio of transmitted light LB+ to reflected light LB2 can be appropriately determined by appropriately selecting the pitch of the grooves and holes.

Moreover, the mirror of this laser beam splitting device 1 can be manufactured easily and at low cost by providing the plurality of holes in a conventional reflecting mirror that is commonly used. Moreover, since it has a simple configuration, it is easy to handle.

4 and 5 show the case where the laser beam splitting device 1 is used for laser processing tfi21.

4 and 5, a column 25 is vertically erected on the rear side of the bed 23 of the laser processing machine 21, and on the upper side in FIG.

Further, a saddle 27 that is movable in the front and back directions of the laser processing machine 21 is provided on the lower part of the front side of the bed 23 in FIG. A movable work table 29 is provided.

A large number of support bins (not shown) are attached to the work table 29, and predetermined workpieces W are placed on the support bins.

The saddle 27 and work table 29 are each driven by a 7#J by a servo motor via a feed screw (not shown).
Afterwards, it is driven left and right. Moreover,
The servo motor that drives the saddle 27 and the work table 29 is controlled by an NCυ control device 31 mounted on the left side of the column 25 in FIG.

The frame 33 is integrally attached to the upper part of the column 25, and a laser oscillator 35 is provided on the upper frame 33. In addition to being connected to the IyJF2 oscillator 35, a support frame 37 is integrally attached to the tip of the IyJF2 upper frame 33.

Approximately in the center of the support frame 37 is a support that supports a laser beam splitting device 1 for splitting the laser beam LB emitted from the laser oscillator 35 into a plurality of parts and a reflecting mirror 39 for reflecting the laser beam L8. 41 are integrally attached.

In order to transmit, for example, half of the laser beam LB, the laser beam splitter [21 is tilted at an angle of, for example, 45 degrees to the right with respect to the laser beam LB, as shown in FIG.
1 is supported. As shown in FIG. 1, the reflecting mirror 39 is supported by a support body 41 at an angle of 45 degrees to the left, for example, with respect to the transmitted light LB1 that is partially transmitted by the laser beam splitting device 1.

On both sides of the support frame 37, there are pend mirrors 43 and 45 for changing the direction of the laser beam LB by 90 degrees,
First and second processing heads 51.53 equipped with condensing lenses 47.49 are provided extending in the vertical direction in FIG. That is, a pend mirror 47 that reflects the laser beam LB is placed above the first and second processing heads 51 and 53.
．． 49 are respectively mounted so as to be inclined at an angle of 45 degrees to the left and to the right, as shown in FIG. 5, with respect to the laser beam LB.

Said 1st. In the lower part of the second processing head 51.53,
The condensing lens 47.49 is attached, and the condensing lens 47.49 collects the laser light LB reflected by the pend mirror 43.45, that is, the reflected light LB2. Each of the transmitted lights L8+ is focused.

1st. Nozzles are attached to the lower ends of the second processing heads 51 and 53, and the laser beams LB are emitted from the respective nozzles and are simultaneously applied to the workpiece W on the work table 29. There is.

With the above configuration, the laser beam LB emitted from the laser oscillator 35 is divided equally into, for example, reflected light LB2 and transmitted light 1 by the laser beam splitter ff11, and the reflected light LB2
is incident on the pendulous mirror 43 of the first processing head 51, reflected, and condensed into the condenser lens 47.

On the other hand, the transmitted light LB1 passes through the reflection mirror 39, enters the pendulous mirror 45 of the second processing head 53, is reflected, and is focused on the condenser lens 49.

The workpiece W placed on the work table 29 is appropriately controlled in the forward and left-right directions by the NG control device eI31, and the laser beam LB from the laser oscillator 35 passes through the laser beam splitting device 1. , 1st. The second machining heads 51 and 53 are equally incident on the first machining head. The second machining heads 51 and 53 simultaneously perform laser machining, for example, machining holes of the same shape. Therefore, the production capacity can be doubled compared to one conventional processing head, and the work efficiency is greatly improved.

The laser beam splitter δ1 divides the laser beam L[3 into N pieces, and N workpieces W can be processed simultaneously by the N processing heads attached to the laser processing machine 21.

Note that the present invention is not limited to the above-mentioned embodiments,
By making appropriate changes, other embodiments can be implemented. For example, if the laser beam splitting device 1 is detachably attached, it is possible to perform laser processing on a thick plate workpiece W according to conventional specifications as needed.

[Efficacy of invention! ! ] As understood from the above description of the embodiments, according to the present invention, the laser beam splitter 9A includes a mirror that intersects with the optical axis of the laser beam in the optical path of the laser beam emitted from the laser oscillator. Since the mirror is formed of a reflecting part and a transmitting part consisting of a plurality of holes at an appropriate ratio, it is possible to easily divide the laser beam into reflected light and transmitted light at an appropriate ratio. can.

Furthermore, the laser beam splitting device has a simple configuration and can be manufactured easily and at low cost.

Furthermore, by combining multiple mirrors in the laser beam splitter, the laser beam can be split into multiple pieces.
It can be used in laser processing machines equipped with multiple processing heads, in which case it is possible to process multiple workpieces at the same time.

[Brief explanation of the drawing]

FIG. 1 is an enlarged view showing an embodiment of the laser beam splitting device of the present invention, FIG. 2 is an enlarged sectional view of the mirror used in FIG. 1, and FIG. 3 is an enlarged view taken from the direction of the arrow This is a perspective view. FIG. 4 is a plan view showing an example of use of the laser beam splitting device of the present invention in a laser processing machine, and FIG. 5 is a front view of FIG. 4. [Explanation of symbols representing main parts of the drawings] 1... Laser beam splitter 3... Housing 11... Semi-transparent mirror 13... Mirror surface part 15... Hole
21...Laser processing machine 29-...Work table 35...Laser oscillator 51.53...
・First. Second processing head 1 Figure 2 @ Figure 3 Figure 4r17:I Figure 5

Claims (1)

[Claims] A mirror that intersects with the optical axis of the laser beam is arranged in the optical path of the laser beam emitted from the laser oscillator, and the mirror is formed of a reflecting section and a transmitting section consisting of a plurality of holes in an appropriate ratio. A laser beam splitting device characterized by: