JPS63191634U - - Google Patents

Info

Publication number
JPS63191634U
JPS63191634U JP8234087U JP8234087U JPS63191634U JP S63191634 U JPS63191634 U JP S63191634U JP 8234087 U JP8234087 U JP 8234087U JP 8234087 U JP8234087 U JP 8234087U JP S63191634 U JPS63191634 U JP S63191634U
Authority
JP
Japan
Prior art keywords
section
clamper
support ring
spring
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8234087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8234087U priority Critical patent/JPS63191634U/ja
Publication of JPS63191634U publication Critical patent/JPS63191634U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP8234087U 1987-05-29 1987-05-29 Pending JPS63191634U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8234087U JPS63191634U (US06826419-20041130-M00005.png) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8234087U JPS63191634U (US06826419-20041130-M00005.png) 1987-05-29 1987-05-29

Publications (1)

Publication Number Publication Date
JPS63191634U true JPS63191634U (US06826419-20041130-M00005.png) 1988-12-09

Family

ID=30934905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8234087U Pending JPS63191634U (US06826419-20041130-M00005.png) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPS63191634U (US06826419-20041130-M00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02120746U (US06826419-20041130-M00005.png) * 1989-03-17 1990-09-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02120746U (US06826419-20041130-M00005.png) * 1989-03-17 1990-09-28

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