JPS63191550A - Sensor for detecting frictional resistance on sliding surface - Google Patents

Sensor for detecting frictional resistance on sliding surface

Info

Publication number
JPS63191550A
JPS63191550A JP1974187A JP1974187A JPS63191550A JP S63191550 A JPS63191550 A JP S63191550A JP 1974187 A JP1974187 A JP 1974187A JP 1974187 A JP1974187 A JP 1974187A JP S63191550 A JPS63191550 A JP S63191550A
Authority
JP
Japan
Prior art keywords
sliding surface
driven body
moving
displacement
moving piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1974187A
Other languages
Japanese (ja)
Other versions
JPH0551420B2 (en
Inventor
Hiroaki Nishikunihara
西国原 宏秋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuma Corp
Original Assignee
Okuma Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuma Machinery Works Ltd filed Critical Okuma Machinery Works Ltd
Priority to JP1974187A priority Critical patent/JPS63191550A/en
Publication of JPS63191550A publication Critical patent/JPS63191550A/en
Publication of JPH0551420B2 publication Critical patent/JPH0551420B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members

Abstract

PURPOSE:To detect poor lubricant supply to a sliding surface of a driven body accurately by arranging a movable body to be displaced by the change in a frictional coefficient on a lower sliding surface of the driven body and by detecting the displacement by means of a sensor. CONSTITUTION:When a feed motor 7 is driven in a normal direction for example, a driven body 3 is moved to the left via a feed screw 6 and a nut 4. At this moment, a movable piece 13 arranged under the driven body 3, being pressed against a sliding surface 2 due to the weight of a sensor case 11 and a spring 12, presses a rear spring 14 with frictional resistance inertia to produce a displacement. The movable piece, however, returns to a neutral position in a short period of time if lubrication is normal. If the lubrication is poor, however, a frictional coefficient mu0 between a lower surface 13b of the movable piece and the sliding surface 2 is large and as a result the movable piece 13 is displaced relative to the case 11. The displacement x0 is detected with a displacement measuring instrument 15 and sent to a control device. In this way, poor lubricant supply to the sliding surface of the driven body can be detected accurately to prevent the sliding surface of a machine from being damaged.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は被駆動体を摺動面との間の潤滑状態を検出する
センサに関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a sensor for detecting the state of lubrication between a driven body and a sliding surface.

従来技術 工作機械のテーブル、往復台をR置する摺動面の摩擦抵
抗は潤滑油の給油状態によって左右される。このため現
在は配管中の分配器の動作、配管系統中の油の流れ等を
確認することで潤滑油の給油状態を知るようになしてい
る。或いは送りモータの電流値で抵抗を測定する方法が
とられている。
The frictional resistance of the sliding surfaces on which the tables and carriages of conventional machine tools are placed depends on the state of lubricating oil. For this reason, the current state of lubricating oil supply is currently known by checking the operation of the distributor in the piping, the flow of oil in the piping system, etc. Alternatively, a method is used in which the resistance is measured by the current value of the feed motor.

発明が解決しようとする問題点 前者の動作、流れを確認する方法では給油状態を知るこ
とができても実際に必要とする摺動面に給油されている
かという判断はし難かった。また後者の電流値で検出す
る方法はどの摺動面が潤滑油不具合なのかがよく判断で
きなかった。
Problems to be Solved by the Invention With the former method of checking the operation and flow, even if it is possible to know the lubricating state, it is difficult to judge whether the required sliding surfaces are actually being lubricated. Furthermore, with the latter method of detecting current values, it was not possible to clearly determine which sliding surface had a lubricant problem.

問題点を解決するための手段 被駆動体3の下面摺接面の凹所3bに摺動面2と直角方
向にのみ移動可能で且つ常に前記摺動面方向に力が作用
する状態に設けられ下面に開口し前記摺動面と平行な底
を存するとともに移動方向の2側面が平行な凹部3Cを
削設したケース部材1)と、該ケース部材1)の凹部3
Cに前記被駆動体3の移動方向にのみ移動可能に装入さ
れ上下面が平行で該凹部の深さより大きな厚みを存し前
記被駆動体の移動方向の長さが前記凹部の移動方向の長
さより短い移動駒13と、前記ケース部材1)の凹部3
cで該移動駒13の移動方向の両側にそれぞれ介装され
該移動駒13を中立位置に保持するばね部材14と、前
記ケース部材1)に設けられ前記移動駒13の移動方向
の変位を検出しその検出信号を出力する変位計15とを
含むものである。
Means for Solving the Problems A recess 3b in the sliding surface of the lower surface of the driven body 3 is provided so that it can move only in a direction perpendicular to the sliding surface 2 and always applies a force in the direction of the sliding surface. A case member 1) in which a recess 3C is opened on the lower surface, has a bottom parallel to the sliding surface, and has two side surfaces parallel to each other in the direction of movement, and a recess 3 of the case member 1).
C is loaded so as to be movable only in the moving direction of the driven body 3, the upper and lower surfaces are parallel, and the thickness is greater than the depth of the recess, and the length in the moving direction of the driven body 3 is the same as the moving direction of the recess. The moving piece 13 shorter than the length and the recess 3 of the case member 1)
Spring members 14 are interposed on both sides of the movable piece 13 in the direction of movement and hold the movable piece 13 in a neutral position, and spring members 14 are provided on the case member 1) to detect the displacement of the movable piece 13 in the direction of movement. It also includes a displacement meter 15 that outputs a detection signal.

実施例 以下本発明の実施例を図面にもとづき説明する。Example Embodiments of the present invention will be described below based on the drawings.

ヘッド1上の摺動面2上に被駆動体3が摺動可能にl1
)1.置され下面に設けたナツト4にベッドに軸受5で
回転のみ可能に設けられた送りねじ6と螺合している。
The driven body 3 is slidable on the sliding surface 2 on the head 1 l1
)1. A nut 4 provided on the lower surface of the bed is screwed into a feed screw 6 which is rotatably provided on the bed with a bearing 5.

そしてベッド1に設けた送りモータ7により歯車、ベル
トを介して送りねし6が回転されることにより移動され
る。被駆動体3の下面の摺接面3aには少なくとも1個
所以上好ましくは離れた位置の2個所に検出センサ1o
が埋設されている。この検出センサ10は被駆動体3の
下面の摺接面3aに垂直に削設された入口部が大径の段
付円筒穴3bの大径部3b、にセンサケースIIが摺接
面3aと直角方向に隙間なく滑りI可能に嵌装され、小
径穴3bzに介挿されたばね12によって常に後述の移
動駒13が摺動面2に押し付けられている。センサケー
ス1)の重量が大きく確実に滑動する場合はばね12は
必ずしも必要なくまたばね12に限定されるものではな
い。このセンサケース1)の摺動面2側には摺動面2と
平行な底面を有し被駆動体3の移動方向と平行な対問2
側面3c1を存し且つ移動方向に長い凹部3Cが削設さ
れている。この凹部3Cに凹部3Cの深さより長く対向
2千面3c+  とは隙間なく滑動できる移動駒13が
嵌装されている。そして移動駒13の上面及び側面の摺
接面は摩擦係数μの小さなテフロン若しくはモリブデン
が表面処理5接着、埋込等の手段により固着されている
。また下面には摺動面2と同じ材質のものが取付は若し
くは移動駒13自体が同じ材質でつくられている。
A feed motor 7 provided on the bed 1 rotates a feed screw 6 via a gear and a belt, thereby moving the bed. On the sliding contact surface 3a of the lower surface of the driven body 3, a detection sensor 1o is provided at at least one location, preferably at two locations separated from each other.
is buried. This detection sensor 10 has a sensor case II connected to a large diameter portion 3b of a stepped cylindrical hole 3b having a large diameter inlet, which is cut perpendicularly to a sliding surface 3a on the lower surface of a driven body 3, and a sensor case II that contacts the sliding surface 3a. The movable piece 13, which will be described later, is always pressed against the sliding surface 2 by a spring 12 inserted into the small diameter hole 3bz, which is fitted so as to be able to slide in the right angle direction without any gap. If the sensor case 1) has a large weight and can be slid reliably, the spring 12 is not necessarily necessary and is not limited to the spring 12. The sensor case 1) has a bottom surface parallel to the sliding surface 2 on the sliding surface 2 side, and a bottom surface parallel to the moving direction of the driven body 3.
A recessed portion 3C is cut out, which has a side surface 3c1 and is long in the direction of movement. A movable piece 13 is fitted into this recess 3C, which is longer than the depth of the recess 3C and can slide with no gap between the opposing 2,000 faces 3c+. The upper and side sliding surfaces of the moving piece 13 are fixed with Teflon or molybdenum having a small coefficient of friction μ by means of surface treatment 5 such as adhesion or embedding. Further, a member made of the same material as the sliding surface 2 is attached to the lower surface, or the moving piece 13 itself is made of the same material.

この移動駒13の移動方向の前後の凹部3Cの壁面との
間には同じ強さのばね14が介装されていて移動駒13
が中立位置に保たれている。このばね14の強さは摺動
面の摩擦係数/1 oが正常値であるとき移動駒13を
中立位置とする強さである。
A spring 14 of the same strength is interposed between the front and rear walls of the recess 3C in the moving direction of the moving piece 13.
is held in a neutral position. The strength of this spring 14 is such that when the friction coefficient/1 o of the sliding surface is a normal value, the moving piece 13 is brought to the neutral position.

更に移動駒13のセンサケース1)即ち被駆動体3との
相対位置を検出する変位計15がセンサケース1)の平
行な対向2側面3c+ に直角で移動駒13の中立位置
よりの変位が測定できる位置に移動駒13の移動方向の
前後に2個所または片側の1個所に埋設され変位計15
の変位出力はり−ド線15aから制御装置に送られる。
Further, a displacement meter 15 that detects the relative position of the movable piece 13 with the sensor case 1), that is, the driven body 3, measures the displacement of the movable piece 13 from the neutral position at right angles to two parallel opposing sides 3c+ of the sensor case 1). The displacement meter 15 is buried in two places on the front and back of the movement direction of the moving piece 13 or one place on one side.
The displacement output is sent to the control device from the lead wire 15a.

そして制御装置内にはテーブルが移りJしているとき加
減速途中移動駒13の不安定な動きを検出しないよう安
定した出力が得られる一定時間後に変位計の出力を取り
出すような回路が設けられ検出値が設定値以上となった
とき警報を発する。
In the control device, a circuit is provided that takes out the output of the displacement meter after a certain period of time when a stable output is obtained so as not to detect unstable movement of the moving piece 13 during acceleration/deceleration when the table is moving. An alarm is issued when the detected value exceeds the set value.

作用 機械の運転に先駆は摺動部1回転部と起動とともに必要
な給油が行われる。送りモータ7が正方向に駆動される
と送りねし6の回転につれナツト4を介して被駆動体3
は図で左方に移動される。
Prior to the operation of the working machine, the sliding part is rotated once, and the necessary oil is supplied at the same time as the start-up. When the feed motor 7 is driven in the forward direction, as the feed screw 6 rotates, the driven body 3 is moved through the nut 4.
is moved to the left in the diagram.

移動駒13はばね12の荷重及びセンサケース1)の重
量との和Wで摺動面2に圧接されているので、テーブル
3の移動当初移動駒13は摺動面2との摩擦抵抗子n性
のため後側のばね14を圧縮してずれを生じるが摺動面
の潤滑が正常であれば短時間で移動駒13はばね14の
力により中立位置に復し初めのおくれがなくなり被駆動
体3の移動が安定している状態では遅れを生じない。し
かし潤滑状態が悪いと移動駒13の下面13bと摺動而
2との間の摩擦係数μ。が大きくなる。今センサケース
1)の四部3Cの底と移動駒13のテフロン13aとの
間のPj擦係数μ、ばね12の荷重とセンサケース1)
の重さの和による荷重をW。
Since the moving piece 13 is pressed against the sliding surface 2 by the sum W of the load of the spring 12 and the weight of the sensor case 1), the moving piece 13 has a frictional resistance n with the sliding surface 2 when the table 3 is moved. Due to the force of the spring 14, the rear spring 14 is compressed and displacement occurs, but if the sliding surface is properly lubricated, the moving piece 13 returns to the neutral position due to the force of the spring 14, eliminating the initial lag and being driven. No delay occurs when the movement of the body 3 is stable. However, if the lubrication condition is poor, the friction coefficient μ between the lower surface 13b of the moving piece 13 and the sliding member 2 will decrease. becomes larger. Now, Pj friction coefficient μ between the bottom of the four parts 3C of the sensor case 1) and the Teflon 13a of the moving piece 13, the load of the spring 12, and the sensor case 1)
The load due to the sum of the weights is W.

ばね14のばね常数をKとずればWμ。=Kx。If the spring constant of the spring 14 is different from K, then Wμ. =Kx.

十μWの関係になるまで移動駒13がずれ、xoだけセ
ンサケース1)に対して相対的に移動する。
The moving piece 13 is shifted until a relationship of 10 μW is reached, and moves by xo relative to the sensor case 1).

この移動層x。が変位計15で検出され、リード線15
aより制御装置に送られる。制御装置内ではテーブル3
の加減速途中で移動駒が不安定な動きの間を検出しない
よう回路構成されているので一定時間安定した出力とな
りその値が設定値より大きくなったとき給油不良として
警告が出される。
This moving layer x. is detected by the displacement meter 15, and the lead wire 15
A is sent to the control device. Table 3 in the control unit
Since the circuit is configured so as not to detect unstable movement of the moving piece during acceleration/deceleration, the output is stable for a certain period of time, and when the value becomes larger than the set value, a warning is issued as a lubrication failure.

その警告に従って給油時間及びその間隔を変更し低速で
往復運動させて異常の回復を確認し、また必要により機
械の運転を停止させるものである。
According to the warning, the refueling time and interval are changed, the machine is reciprocated at low speed, and recovery from the abnormality is confirmed, and if necessary, the operation of the machine is stopped.

効果 以上詳述したように本発明は被駆動体の下面の摺接面に
摩擦係数の変化で相対変位を起こす移動駒を設けその変
位量を検出するセンサを設けたので、被駆動体の摺接面
への給油不良が正確に検知できて機械摺動面の1員傷を
未然に防止し、機械の修理を少なくするとともに機械稼
動効率を上げることができる効果を有する。
Effects As detailed above, the present invention includes a movable piece that causes relative displacement due to a change in the coefficient of friction on the sliding surface of the lower surface of the driven body, and a sensor that detects the amount of displacement. This has the effect of accurately detecting insufficient oil supply to contact surfaces, preventing damage to one member of the sliding surface of the machine, reducing the number of repairs to the machine, and increasing machine operating efficiency.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は機械系の説明図、第2図は検出センサ10の縦
断面図、第3図は第2図のA −A vA断面回である
。 2・・摺動面     3・・被駆動体10・・検出セ
ンサ  1)・・センサケース13・・移動駒    
12.14・・ばね15・・変位計
FIG. 1 is an explanatory diagram of the mechanical system, FIG. 2 is a longitudinal cross-sectional view of the detection sensor 10, and FIG. 3 is a cross-sectional view taken along A-A vA in FIG. 2. 2...Sliding surface 3...Driven object 10...Detection sensor 1)...Sensor case 13...Moving piece
12.14... Spring 15... Displacement meter

Claims (2)

【特許請求の範囲】[Claims] (1)摺動面上を移動する被駆動体の下面摺接面の凹所
に前記摺動面と直角方向にのみ移動可能で且つ常に前記
摺動面方向に力が作用する状態に設けられ下面に開口し
前記摺動面と平行な底を有するとともに移動方向の2側
面が平行な凹部を削設したケース部材と、該ケース部材
の凹部に前記被駆動体の移動方向にのみ移動可能に装入
され上下面が平行で該凹部の深さより大きな厚みを有し
前記被駆動体の移動方向の長さが前記凹部の移動方向の
長さより短い移動駒と、前記ケース部材の凹部で該移動
駒の移動方向の両側にそれぞれ介装され該移動駒を中立
位置に保持するばね部材と、前記ケース部材に設けられ
前記移動駒の移動方向の変位を検出しその検出信号を出
力する変位計とを含んでなり、被駆動体と移動駒の相対
的移動を検出することを特徴とする摺動面の摩擦抵抗検
出センサ。
(1) Provided in a recess in the lower sliding surface of a driven object that moves on the sliding surface so that it can move only in a direction perpendicular to the sliding surface and always applies a force in the direction of the sliding surface. a case member having a concave portion opened on the lower surface and having a bottom parallel to the sliding surface and having two side surfaces parallel to the direction of movement; A moving piece that is loaded and whose upper and lower surfaces are parallel, has a thickness greater than the depth of the recess, and whose length in the moving direction of the driven body is shorter than the length of the driven body in the moving direction of the recess, and the moving piece that moves in the recess of the case member. The method includes a spring member that is interposed on each side of the moving piece in the moving direction and holds the moving piece in a neutral position, and a displacement meter that is provided on the case member and that detects the displacement of the moving piece in the moving direction and outputs a detection signal. A friction resistance detection sensor for a sliding surface, which detects relative movement between a driven body and a moving piece.
(2)移動駒の凹部との接触面は摩擦係数の小さな材質
が、また摺動面との接触面は摺動面と同一材質であるこ
とを特徴とする特許請求の範囲第1項記載の摺動面の摩
擦抵抗検出センサ。
(2) The slide according to claim 1, wherein the contact surface with the recess of the moving piece is made of a material with a small coefficient of friction, and the contact surface with the sliding surface is made of the same material as the sliding surface. Frictional resistance detection sensor on moving surfaces.
JP1974187A 1987-01-30 1987-01-30 Sensor for detecting frictional resistance on sliding surface Granted JPS63191550A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974187A JPS63191550A (en) 1987-01-30 1987-01-30 Sensor for detecting frictional resistance on sliding surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974187A JPS63191550A (en) 1987-01-30 1987-01-30 Sensor for detecting frictional resistance on sliding surface

Publications (2)

Publication Number Publication Date
JPS63191550A true JPS63191550A (en) 1988-08-09
JPH0551420B2 JPH0551420B2 (en) 1993-08-02

Family

ID=12007759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974187A Granted JPS63191550A (en) 1987-01-30 1987-01-30 Sensor for detecting frictional resistance on sliding surface

Country Status (1)

Country Link
JP (1) JPS63191550A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203510A (en) * 1992-01-28 1993-08-10 Matsushita Electric Works Ltd Method and apparatus for measuring frictional force
JPH0671049U (en) * 1993-03-10 1994-10-04 東京部品工業株式会社 Lubricating oil out detector on sliding surface
JP2007510164A (en) * 2003-10-31 2007-04-19 アプライド マテリアルズ インコーポレイテッド Polishing end point detection system and method using friction sensor
JP2009121959A (en) * 2007-11-15 2009-06-04 Honda Motor Co Ltd Method of measuring sliding resistance of sliding member and measuring device
US8342906B2 (en) 2003-10-31 2013-01-01 Applied Materials, Inc. Friction sensor for polishing system
US11660722B2 (en) 2018-08-31 2023-05-30 Applied Materials, Inc. Polishing system with capacitive shear sensor

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05203510A (en) * 1992-01-28 1993-08-10 Matsushita Electric Works Ltd Method and apparatus for measuring frictional force
JPH0671049U (en) * 1993-03-10 1994-10-04 東京部品工業株式会社 Lubricating oil out detector on sliding surface
JP2007510164A (en) * 2003-10-31 2007-04-19 アプライド マテリアルズ インコーポレイテッド Polishing end point detection system and method using friction sensor
JP4764825B2 (en) * 2003-10-31 2011-09-07 アプライド マテリアルズ インコーポレイテッド Polishing end point detection system and method using friction sensor
US8342906B2 (en) 2003-10-31 2013-01-01 Applied Materials, Inc. Friction sensor for polishing system
US8758086B2 (en) 2003-10-31 2014-06-24 Applied Materials, Inc. Friction sensor for polishing system
JP2009121959A (en) * 2007-11-15 2009-06-04 Honda Motor Co Ltd Method of measuring sliding resistance of sliding member and measuring device
US11660722B2 (en) 2018-08-31 2023-05-30 Applied Materials, Inc. Polishing system with capacitive shear sensor

Also Published As

Publication number Publication date
JPH0551420B2 (en) 1993-08-02

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