JPS63191543U - - Google Patents
Info
- Publication number
- JPS63191543U JPS63191543U JP14686687U JP14686687U JPS63191543U JP S63191543 U JPS63191543 U JP S63191543U JP 14686687 U JP14686687 U JP 14686687U JP 14686687 U JP14686687 U JP 14686687U JP S63191543 U JPS63191543 U JP S63191543U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- substrate
- fluid pressure
- view
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Switches Operated By Changes In Physical Conditions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14686687U JPS63191543U (enExample) | 1987-01-21 | 1987-09-25 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP732187 | 1987-01-21 | ||
| JP14686687U JPS63191543U (enExample) | 1987-01-21 | 1987-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63191543U true JPS63191543U (enExample) | 1988-12-09 |
Family
ID=33454731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14686687U Pending JPS63191543U (enExample) | 1987-01-21 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63191543U (enExample) |
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1987
- 1987-09-25 JP JP14686687U patent/JPS63191543U/ja active Pending