JPS63191543U - - Google Patents

Info

Publication number
JPS63191543U
JPS63191543U JP14686687U JP14686687U JPS63191543U JP S63191543 U JPS63191543 U JP S63191543U JP 14686687 U JP14686687 U JP 14686687U JP 14686687 U JP14686687 U JP 14686687U JP S63191543 U JPS63191543 U JP S63191543U
Authority
JP
Japan
Prior art keywords
diaphragm
substrate
fluid pressure
view
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14686687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14686687U priority Critical patent/JPS63191543U/ja
Publication of JPS63191543U publication Critical patent/JPS63191543U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Switches Operated By Changes In Physical Conditions (AREA)
JP14686687U 1987-01-21 1987-09-25 Pending JPS63191543U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14686687U JPS63191543U (enrdf_load_stackoverflow) 1987-01-21 1987-09-25

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP732187 1987-01-21
JP14686687U JPS63191543U (enrdf_load_stackoverflow) 1987-01-21 1987-09-25

Publications (1)

Publication Number Publication Date
JPS63191543U true JPS63191543U (enrdf_load_stackoverflow) 1988-12-09

Family

ID=33454731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14686687U Pending JPS63191543U (enrdf_load_stackoverflow) 1987-01-21 1987-09-25

Country Status (1)

Country Link
JP (1) JPS63191543U (enrdf_load_stackoverflow)

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