JPS63191118A - Deflecting device - Google Patents

Abstract

PURPOSE:To obtain a deflecting device simplified at its mechanism, and reduced at its size, weight and power consumption to utilize the device for laser beams or the like by connecting a light deflecting mirror with plural piezoelectric deformation elements utilizing thickness share vibration through a flexible coupling means. CONSTITUTION:Two lamination type piezoelectric elements 51, 52 are connected to a power supply 4, and at the time of impressing voltage, the elements 51, 52 are displaced respectively in the X and -X directions. The mirror 7 is coupled with the elements 51, 52 through hinges 81, 82, and at the time of deforming the elements 51, 52, the mirror 7 is rotated around the Z axis and incident light is deflected by theta. Since the deflecting mirror is rotated and deflection is executed by utilizing the deformation of the lamination type piezoelectric deforming elements utilizing thickness share vibration and the elements are small and light-weight, the deflecting device can be easily miniaturized and light-weighted and deflection can be attained with low power consumption.

Description

DETAILED DESCRIPTION OF THE INVENTION (Objective of the Invention) (Industrial Application Field) The present invention relates to a deflection device for a laser beam or the like, and particularly to a deflection device with an improved means for driving a deflection mirror.

(Prior art) In recent years, laser beams have been used in industrial applications such as barcode readers, and consumer applications such as optical pickups, and the need for compact, high-performance laser beam deflection devices has increased. There is.

Such conventional deflection devices generally use electromagnets and are rare.

FIG. 7 shows a conceptual diagram of a conventional deflection device using electromagnets.

The mirror 7 is supported by a leaf spring 11, and has iron cores 121 and 122 attached to both ends thereof. Iron core 121゜1
Coils 131 and 132 are provided on the outside of 22, respectively.

By passing current through these two coils 131 and 132 at the timing shown in FIG. 8, vertical forces are applied to both ends of the mirror 7 at exactly opposite timings, causing the mirror 7 to move on a seesaw-like principle. Can be driven.

(Problems to be solved by the invention) However, such an electromagnetic drive requires parts such as an iron core and a coil, which makes the mechanism complicated and requires small size and
It becomes difficult to turn the town into a light village. In addition, in order to generate sufficient magnetic force in the electromagnet to move the mirror, a large amount of current must be passed through the coil, resulting in an increase in power consumption.

The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide a deflection device for a laser beam or the like that has a simple mechanism, is compact, lightweight, and consumes low power.

(Structure of the Invention) (Means for Solving the Problems) In order to achieve the above object, the present invention provides a deflection device such as a laser beam that drives a deflection mirror using a piezoelectric displacement element. do.

(Function) The present invention uses the displacement of a laminated piezoelectric displacement element that utilizes thickness shear vibration to rotate a deflection mirror to perform deflection.Since the piezoelectric displacement element is small and lightweight, the deflection device It can also be made smaller and lighter, and the mechanism is simpler.It can also be configured to perform two-dimensional movement, and it also has the low power consumption characteristic of piezoelectric displacement elements.

(Example) Embodiments of the present invention will be described below with reference to the drawings.

FIG. 3 is an explanatory diagram of a laminated piezoelectric displacement element using thickness-slide imaging used in the present invention. The laminated piezoelectric displacement element that utilizes thickness shear vibration consists of piezoelectric plates 1 that are polarized as shown by the arrows in the figure, and are laminated with electrodes 2 interposed so that their polarization directions alternate. The electrode 2 is connected to a power source 4 via a lead wire 3, and when a voltage is applied, it is displaced in the Y direction as shown by the broken line in the figure.

FIG. 4 is an explanatory diagram of a laminated piezoelectric displacement element using thickness-to-edge imaging that performs two-dimensional operation. Two laminated piezoelectric displacement elements 51 and 52 are coupled via a spacer 6, and when a voltage from a power source 41 is applied, 51 is displaced in the X direction,
When the voltage of the power source 42 is applied, the element 52 is displaced in the Y direction.

In this way, a laminated piezoelectric displacement element that performs two-dimensional operation is constructed.

FIG. 1 is a block diagram showing a first embodiment of the present invention. 2
The two laminated piezoelectric elements 51 and 52 are connected to the power source 4 as shown in the figure.
When a voltage is applied, 51 moves in the X direction,
52 is displaced in the -X direction.

Further, the mirror 7 is coupled to laminated piezoelectric elements 51 and 52 via hinges 81 and 82.

FIG. 2 is an explanatory diagram of the principle of optical deflection. This is shown in Figure 1 viewed from above, and since 51 is displaced in the X direction and 52 is displaced in the -X direction, the mirror 7 rotates around the Z axis as shown by the broken line, and the incident light is deflected by θ. For example, the applied voltage is 100
A deflection angle of about 2.8 mrad was obtained using a stacked piezoelectric element with a displacement of 12JiIIIt in V.

FIGS. 5 and 6 are configuration diagrams showing second and third embodiments of the present invention. Portions corresponding to those in FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted.

In the embodiment shown in FIG. 5, one end of the mirror is connected to a fixed surface 9 via a hinge 8, and the deflection device is constructed using only 1 fil of laminated piezoelectric elements.

The embodiment shown in FIG. 6 uses a two-dimensionally movable laminated piezoelectric element 1 (h, 102) that causes displacement in the Y and Z directions to enable rotation around the X and Z axes.

These two rotation angles can be independently controlled by the voltages of the power supplies 41 and 42.

Note that the present invention is not limited to the above embodiments,
Various modifications can be made without departing from the gist of the invention.

(Effects of the Invention) According to the present invention, by using a laminated piezoelectric displacement element that utilizes sliding imaging, it is possible to construct a deflection device that is small, lightweight, and has a simple mechanism. This deflection device also has the feature of low power consumption. It is also possible to configure the deflection device for further two-dimensional operation.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining the first embodiment of the present invention, and FIG.
The figure is a diagram for explaining the principle of deflection in the present invention.
4 and 4 are diagrams for explaining the laminated piezoelectric element used in the present invention, and FIGS. 5 and 6 are diagrams for explaining the laminated piezoelectric element used in the present invention, respectively.
FIGS. 7 and 8 are diagrams for explaining the third embodiment, and FIGS. 7 and 8 are diagrams for explaining the conventional example. 1... Piezoelectric element 2... Electrode 3... Lead wire 4... Power source 5... Laminated piezoelectric element 6... Spacer 7... Deflection mirror 8... Hinge 9...・Fixed wall 10...Laminated piezoelectric element (two-dimensional movement) 11...Flat spring 12...Iron core 13...Coil representative Patent attorney Yudo Noriyoshi Chika Kikuo Takehana Figure 1 Figure 2 z Figure 4 Figure 5 Figure 6

Claims (2)

[Claims] (1) A deflection device characterized in that a light deflection mirror and a plurality of piezoelectric displacement elements using thickness shear vibration are connected by a flexible coupling means. (2) The deflection device according to claim 1, wherein the piezoelectric displacement element is configured to perform two-dimensional operation by shifting the polarization direction in a right angle direction.