JPS63190U - - Google Patents
Info
- Publication number
- JPS63190U JPS63190U JP9289686U JP9289686U JPS63190U JP S63190 U JPS63190 U JP S63190U JP 9289686 U JP9289686 U JP 9289686U JP 9289686 U JP9289686 U JP 9289686U JP S63190 U JPS63190 U JP S63190U
- Authority
- JP
- Japan
- Prior art keywords
- pump device
- cooler
- turbo
- molecular pump
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 4
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9289686U JPS63190U (cs) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9289686U JPS63190U (cs) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63190U true JPS63190U (cs) | 1988-01-05 |
Family
ID=30954994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9289686U Pending JPS63190U (cs) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63190U (cs) |
-
1986
- 1986-06-18 JP JP9289686U patent/JPS63190U/ja active Pending