JPS63190965U - - Google Patents

Info

Publication number
JPS63190965U
JPS63190965U JP1987081257U JP8125787U JPS63190965U JP S63190965 U JPS63190965 U JP S63190965U JP 1987081257 U JP1987081257 U JP 1987081257U JP 8125787 U JP8125787 U JP 8125787U JP S63190965 U JPS63190965 U JP S63190965U
Authority
JP
Japan
Prior art keywords
electrode
columnar electrodes
thermal expansion
rate sensor
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987081257U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987081257U priority Critical patent/JPS63190965U/ja
Publication of JPS63190965U publication Critical patent/JPS63190965U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
JP1987081257U 1987-05-29 1987-05-29 Pending JPS63190965U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987081257U JPS63190965U (enrdf_load_stackoverflow) 1987-05-29 1987-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987081257U JPS63190965U (enrdf_load_stackoverflow) 1987-05-29 1987-05-29

Publications (1)

Publication Number Publication Date
JPS63190965U true JPS63190965U (enrdf_load_stackoverflow) 1988-12-08

Family

ID=30932832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987081257U Pending JPS63190965U (enrdf_load_stackoverflow) 1987-05-29 1987-05-29

Country Status (1)

Country Link
JP (1) JPS63190965U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60144664A (ja) * 1984-01-09 1985-07-31 Tamagawa Seiki Kk ガスレ−トセンサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60144664A (ja) * 1984-01-09 1985-07-31 Tamagawa Seiki Kk ガスレ−トセンサ

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